Results of calibration of the piezoelectric scanner using the probe TGQ1

Description

Teaching file. Results of calibration of the piezoelectric scanner using the probe TGQ1. Scanning in contact mode. NTEGRA Prima (NT-MDT) device. CSG probe 10.

Most microscopes with a scanning probe base their operation on the use of piezoelectric scanners, which allow the probe to be moved in relation to the tested surface. The correct operation of the above-mentioned elements is of key importance for the reliability of the obtained topographic images. In order to verify the quality of their operation, calibration samples with a specific geometry are used. By comparing the obtained images with the known surface profile, it is possible to determine and correct deviations in the operation of piezoelectric elements. In the described case, a tester in the form of a silicon wafer was used with marked square peaks 20 nm high and 1.5 µm long, spaced periodically at a distance of 3 µm. The file contains 3 images.

Dataset file

Set2.mdt

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CC BY-NC

Non-commercial
Software:: Gwyddion

Details

Year of publication:

2021

Verification date:

2021-04-29

Dataset language:

English

Fields of science:

chemical sciences (Natural sciences)

DOI:

10.34808/129s-9c66

Series:

Scanning Probe Microscopies data

Verified by:

Gdańsk University of Technology

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