Search results for: dielectric layers

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- Gdańsk University of Technology
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Integrated circuit structure surface images obtained with contact capacitive imaging technique
Open Research Data
open access
- A. Zieliński
- J. Ryl
- series: Scanning Probe Microscopies data
The measurements were done using NTEGRA Prima (NT-MDT) device. CSG 10Pt probe.
TEM and EDX study of the Al2O3 ultra thin films
Open Research Data
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- M. Łapiński
The ultra-thin layers of Al2O3 were deposited on a silicon substrates. The method of atomic layer deposition (Beneq TFS 200 ALD system) was chosen as the proper method of dielectric layer deposition. This method provides precise thickness control down to a single atomic layer. The precursors used were trimethylaluminum (Sigma-Aldrich) and purified water....

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Search results for: dielectric layers

Integrated circuit structure surface images obtained with contact capacitive imaging technique

TEM and EDX study of the Al2O3 ultra thin films