Search results for: integrated monitoring
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Search results for: integrated monitoring
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The surface of a fragment of the structure of an integrated circuit in the semi-contact mode.
Open Research DataThe surface of a fragment of the structure of an integrated circuit. Topographic measurements in the semi-contact mode. NTEGRA Prima (NT-MDT) device. NSG 01 probe.
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Silicon microcantilever with impedance sensor
Open Research DataThe issue of microelectromechanical systems (MEMS) [1] has been enjoying popularity and interest since the 90s of the 20th century. Microcells are one of the simplest devices of this type, but they can be widely used in sensors. There are reports on the possibility of using this type of sensors in the context of such important issues as diagnostics...