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  • ETS prices 2008-2024

    Open Research Data
    open access

    The European Union Emissions Trading System (EU ETS) is a carbon emission trading scheme (or cap and trade scheme) which began in 2005 and is intended to lower greenhouse gas emissions by the European Union countries. The "ETS prices 2008-2024" dataset contains a summary of ETS prices in 2008-2024.

  • Structural investigations of the Al2O3 ultra thin films

    Open Research Data
    open access

    Ultra-thin layers of Al2O3 were deposited by atomic layer deposition (ALD) (Beneq TFS 200 ALD system). This method provides precise thickness control down to a single atomic layer. The precursors used were trimethylaluminum (Sigma-Aldrich) and purified water. The deposition of the atomic layer was carried out at 200 °C. Samples with a thickness of 2...

  • TEM and EDX study of the Al2O3 ultra thin films

    Open Research Data
    open access

    The ultra-thin layers of Al2O3 were deposited on a silicon substrates. The method of atomic layer deposition (Beneq TFS 200 ALD system) was chosen as the proper method of dielectric layer deposition. This method provides precise thickness control down to a single atomic layer. The precursors used were trimethylaluminum (Sigma-Aldrich) and purified water....