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Deposition and characterization of organic polymer thin films using a dielectric barrier discharge with different C2Hm/N2 (m = 2, 4, 6) gas mixtures
Abstract
Organic polymer thin films have been deposited on Si(100) and aluminum coated glass substrates by a dielectric barrier discharge (DBD) operated at medium pressure using different C2Hm/N2 (m = 2, 4, 6) gas mixtures. The deposited films were characterized by various spectroscopic techniques. Fourier transform infrared reflection absorption spectroscopy (FT-IRRAS) revealed the chemical functional groups present in the films. The surface chemical compositions have been derived from X-ray photo electron spectroscopy (XPS). FT-IRRAS and XPS show the presence of sp, sp2 and sp3 bonds of carbon and nitrogen. Various functional groups such as NH containing, saturated and unsaturated alkyl groups have been identified. Thin films obtained from C2H2/N2 and C2H4/N2 gas mixtures revealed a higher N/C ratio when compared to thin films obtained from C2H6/N2. Thickness, refractive index and extinction coefficient were evaluated by spectroscopic ellipsometry (SE). Significant differences between the films obtained with different gas mixtures are observed.
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Authors (6)
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Thejaswini Chandrashekaraiah
- EMAU Greifswald Institut f ̈ur Physik
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Vladimir Danilov
- EMAU Greifswald Institut f ̈ur Physik
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Jan Schäfer
- EMAU Greifswald Institut f ̈ur Physik
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Jürgen Meichsner
- EMAU Greifswald Institut f ̈ur Physik
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Rainer Hippler
- EMAU Greifswald Institut f ̈ur Physik
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Details
- Category:
- Articles
- Type:
- artykuł w czasopiśmie wyróżnionym w JCR
- Published in:
-
EUROPEAN PHYSICAL JOURNAL D
no. 69,
edition 6,
pages 1 - 6,
ISSN: 1434-6060 - Language:
- English
- Publication year:
- 2015
- Bibliographic description:
- Chandrashekaraiah T., Bogdanowicz R., Danilov V., Schäfer J., Meichsner J., Hippler R.: Deposition and characterization of organic polymer thin films using a dielectric barrier discharge with different C2Hm/N2 (m = 2, 4, 6) gas mixtures// EUROPEAN PHYSICAL JOURNAL D. -Vol. 69, iss. 6 (2015), s.1-6
- DOI:
- Digital Object Identifier (open in new tab) 10.1140/epjd/e2015-50675-9
- Verified by:
- Gdańsk University of Technology
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