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Abstract
In the paper authors present a special measurement system for observing phase objects. The diffraction phas microscopy makes it possible to measure the dimensions of a tested object with a nanometre resolution. To meet this requirement, it is proposed to apply a spatial transform. The proposed setup can be based either on a two lenses system (called 4 f ) or a Wollaston prism. Both solutions with all construction aspects are described in the paper. To make a full analysis of the object shape the authors developed an accurate image processing algorithm, also presented in the paper.
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- Category:
- Articles
- Type:
- artykuł w czasopiśmie wyróżnionym w JCR
- Published in:
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Metrology and Measurement Systems
no. 25,
pages 213 - 221,
ISSN: 0860-8229 - Language:
- English
- Publication year:
- 2018
- Bibliographic description:
- Babicz-Kiewlicz S., Stawarz-Graczyk B., Wierzba P.: PHASE OBJECT OBSERVATION SYSTEM BASED ON DIFFRACTION PHASE MICROSCOPY// Metrology and Measurement Systems. -Vol. 25, nr. 1 (2018), s.213-221
- Verified by:
- Gdańsk University of Technology
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