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Search results for: ATOMIC LAYER DEPOSITION
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Structural investigations of the Al2O3 ultra thin films
Open Research DataUltra-thin layers of Al2O3 were deposited by atomic layer deposition (ALD) (Beneq TFS 200 ALD system). This method provides precise thickness control down to a single atomic layer. The precursors used were trimethylaluminum (Sigma-Aldrich) and purified water. The deposition of the atomic layer was carried out at 200 °C. Samples with a thickness of 2...
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TEM and EDX study of the Al2O3 ultra thin films
Open Research DataThe ultra-thin layers of Al2O3 were deposited on a silicon substrates. The method of atomic layer deposition (Beneq TFS 200 ALD system) was chosen as the proper method of dielectric layer deposition. This method provides precise thickness control down to a single atomic layer. The precursors used were trimethylaluminum (Sigma-Aldrich) and purified water....
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Depth profile of the composition of 8 nm Al2O3 thin film
Open Research Data8 nm layer of aluminum oxide (Al2O3) was deposited by ALD method on a s. Atomic layer deposition provides precise thickness control down to a single atomic layer. The precursors used were trimethylaluminum (Sigma-Aldrich) and purified water. The deposition of the atomic layer was carried out at 200 °C. To investigate the profile of concenration of...
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Chemical investigation of the Al2O3 ultra-thin films
Open Research DataUltra-thin layers of oluminum oxide (Al2O3) were deposited by ALD method. Atomic layer deposition provides precise thickness control down to a single atomic layer. The precursors used were trimethylaluminum (Sigma-Aldrich) and purified water. The deposition of the atomic layer was carried out at 200 °C. Samples with a thickness of 2 and 8 nm of alumina...
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Application of optical microsphere in fiber optic sensors for measurement of electrochemical processes
Open Research Datainvestigation of the electrochemical processes using micro-sphere fiber-optic sensor with a zinc oxide (ZnO) coating applied by Atomic Layer Deposition method (ALD). The measurements were performed in 1M KNO3 during a decomposition of Bisphenol-A
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Measurement spectrum obtained with the use of ZnO coated (100 nm) microsphere-based fiber-optic sensor - 200 Celsius degrees
Open Research DataApplication of a microsphere-based fiber-optic sensor with 100 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements between 100°C and 300°C, is presented. The main advantage of integrating a fiber-optic microsphere with a sensing device is the possibility of monitoring the integrity of the sensor...
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Measurement spectrum obtained with the use of ZnO coated (100 nm) microsphere-based fiber-optic sensor - 300 Celsius degrees
Open Research DataApplication of a microsphere-based fiber-optic sensor with 100 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements between 100°C and 300°C, is presented. The main advantage of integrating a fiber-optic microsphere with a sensing device is the possibility of monitoring the integrity of the sensor...
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Measurement spectrum obtained with the use of ZnO coated (100 nm) microsphere-based fiber-optic sensor - 100 Celsius degrees
Open Research DataApplication of a microsphere-based fiber-optic sensor with 100 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements between 100°C and 300°C, is presented. The main advantage of integrating a fiber-optic microsphere with a sensing device is the possibility of monitoring the integrity of the sensor...
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Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - microsphere inspection s.2
Open Research DataApplication of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements between 100°C and 300°C, is presented. The main advantage of integrating a fiber-optic microsphere with a sensing device is the possibility of monitoring the integrity of the sensor...
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Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - microsphere inspection s.1
Open Research DataApplication of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements between 100°C and 300°C, is presented. The main advantage of integrating a fiber-optic microsphere with a sensing device is the possibility of monitoring the integrity of the sensor...
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Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 140 Celsius degrees
Open Research DataApplication of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements between 100°C and 300°C, is presented. The main advantage of integrating a fiber-optic microsphere with a sensing device is the possibility of monitoring the integrity of the sensor...
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Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 160 Celsius degrees
Open Research DataApplication of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements between 100°C and 300°C, is presented. The main advantage of integrating a fiber-optic microsphere with a sensing device is the possibility of monitoring the integrity of the sensor...
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Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 220 Celsius degrees
Open Research DataApplication of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements between 100°C and 300°C, is presented. The main advantage of integrating a fiber-optic microsphere with a sensing device is the possibility of monitoring the integrity of the sensor...
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Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 200 Celsius degrees
Open Research DataApplication of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements between 100°C and 300°C, is presented. The main advantage of integrating a fiber-optic microsphere with a sensing device is the possibility of monitoring the integrity of the sensor...
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Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-0optic sensor - 250 Celsius degrees
Open Research DataApplication of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements between 100°C and 300°C, is presented. The main advantage of integrating a fiber-optic microsphere with a sensing device is the possibility of monitoring the integrity of the sensor...
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Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 300 Celsius degrees
Open Research DataApplication of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements between 100°C and 300°C, is presented. The main advantage of integrating a fiber-optic microsphere with a sensing device is the possibility of monitoring the integrity of the sensor...
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Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 270 Celsius degrees
Open Research DataApplication of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements between 100°C and 300°C, is presented. The main advantage of integrating a fiber-optic microsphere with a sensing device is the possibility of monitoring the integrity of the sensor...
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Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 190 Celsius degrees
Open Research DataApplication of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements between 100°C and 300°C, is presented. The main advantage of integrating a fiber-optic microsphere with a sensing device is the possibility of monitoring the integrity of the sensor...
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Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 260 Celsius degrees
Open Research DataApplication of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements between 100°C and 300°C, is presented. The main advantage of integrating a fiber-optic microsphere with a sensing device is the possibility of monitoring the integrity of the sensor...
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Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 150 Celsius degrees
Open Research DataApplication of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements between 100°C and 300°C, is presented. The main advantage of integrating a fiber-optic microsphere with a sensing device is the possibility of monitoring the integrity of the sensor...
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Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 230 Celsius degrees
Open Research DataApplication of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements between 100°C and 300°C, is presented. The main advantage of integrating a fiber-optic microsphere with a sensing device is the possibility of monitoring the integrity of the sensor...
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Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - microsphere inspection s.4
Open Research DataApplication of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements between 100°C and 300°C, is presented. The main advantage of integrating a fiber-optic microsphere with a sensing device is the possibility of monitoring the integrity of the sensor...
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Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - microsphere inspection s.5
Open Research DataApplication of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements between 100°C and 300°C, is presented. The main advantage of integrating a fiber-optic microsphere with a sensing device is the possibility of monitoring the integrity of the sensor...
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Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - microsphere inspection s.3
Open Research DataApplication of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements between 100°C and 300°C, is presented. The main advantage of integrating a fiber-optic microsphere with a sensing device is the possibility of monitoring the integrity of the sensor...
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Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 180 Celsius degrees
Open Research DataApplication of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements between 100°C and 300°C, is presented. The main advantage of integrating a fiber-optic microsphere with a sensing device is the possibility of monitoring the integrity of the sensor...
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Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 210 Celsius degrees
Open Research DataApplication of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements between 100°C and 300°C, is presented. The main advantage of integrating a fiber-optic microsphere with a sensing device is the possibility of monitoring the integrity of the sensor...
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Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 290 Celsius degrees
Open Research DataApplication of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements between 100°C and 300°C, is presented. The main advantage of integrating a fiber-optic microsphere with a sensing device is the possibility of monitoring the integrity of the sensor...
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Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 170 Celsius degrees
Open Research DataApplication of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements between 100°C and 300°C, is presented. The main advantage of integrating a fiber-optic microsphere with a sensing device is the possibility of monitoring the integrity of the sensor...
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Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 280 Celsius degrees
Open Research DataApplication of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements between 100°C and 300°C, is presented. The main advantage of integrating a fiber-optic microsphere with a sensing device is the possibility of monitoring the integrity of the sensor...
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Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 240 Celsius degrees
Open Research DataApplication of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements between 100°C and 300°C, is presented. The main advantage of integrating a fiber-optic microsphere with a sensing device is the possibility of monitoring the integrity of the sensor...
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Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 220 Celsius degrees
Open Research DataApplication of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements between 100°C and 300°C, is presented. The main advantage of integrating a fiber-optic microsphere with a sensing device is the possibility of monitoring the integrity of the sensor...
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Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 130 Celsius degrees
Open Research DataApplication of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements between 100°C and 300°C, is presented. The main advantage of integrating a fiber-optic microsphere with a sensing device is the possibility of monitoring the integrity of the sensor...
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Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 110 Celsius degrees
Open Research DataApplication of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements between 100°C and 300°C, is presented. The main advantage of integrating a fiber-optic microsphere with a sensing device is the possibility of monitoring the integrity of the sensor...
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Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 120 Celsius degrees
Open Research DataApplication of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements between 100°C and 300°C, is presented. The main advantage of integrating a fiber-optic microsphere with a sensing device is the possibility of monitoring the integrity of the sensor...
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Temperature measurement of supercapacitor with the use of ZnO coated microsphere-based fiber-optic sensor - 75 Celsius degrees
Open Research DataApplication of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements of supercapasitor, is presented. Internal temperature of the supercapacitor is investigated in the range between 30°C and 90°C. The supercapacitor temperature was investigated using...
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Temperature measurement of supercapacitor with the use of ZnO coated microsphere-based fiber-optic sensor - 65 Celsius degrees
Open Research DataApplication of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements of supercapasitor, is presented. Internal temperature of the supercapacitor is investigated in the range between 30°C and 90°C. The supercapacitor temperature was investigated using...
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Temperature measurement of supercapacitor with the use of ZnO coated microsphere-based fiber-optic sensor - 90 Celsius degrees
Open Research DataApplication of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements of supercapasitor, is presented. Internal temperature of the supercapacitor is investigated in the range between 30°C and 90°C. The supercapacitor temperature was investigated using...
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Temperature measurement of supercapacitor with the use of ZnO coated microsphere-based fiber-optic sensor - 80 Celsius degrees
Open Research DataApplication of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements of supercapasitor, is presented. Internal temperature of the supercapacitor is investigated in the range between 30°C and 90°C. The supercapacitor temperature was investigated using...
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Temperature measurement of supercapacitor with the use of ZnO coated microsphere-based fiber-optic sensor - 45 Celsius degrees
Open Research DataApplication of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements of supercapasitor, is presented. Internal temperature of the supercapacitor is investigated in the range between 30°C and 90°C. The supercapacitor temperature was investigated using...
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Temperature measurement of supercapacitor with the use of ZnO coated microsphere-based fiber-optic sensor - 35 Celsius degrees
Open Research DataApplication of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements of supercapasitor, is presented. Internal temperature of the supercapacitor is investigated in the range between 30°C and 90°C. The supercapacitor temperature was investigated using...
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Temperature measurement of supercapacitor with the use of ZnO coated microsphere-based fiber-optic sensor - 50 Celsius degrees
Open Research DataApplication of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements of supercapasitor, is presented. Internal temperature of the supercapacitor is investigated in the range between 30°C and 90°C. The supercapacitor temperature was investigated using...
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Temperature measurement of supercapacitor with the use of ZnO coated microsphere-based fiber-optic sensor - 70 Celsius degrees
Open Research DataApplication of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements of supercapasitor, is presented. Internal temperature of the supercapacitor is investigated in the range between 30°C and 90°C. The supercapacitor temperature was investigated using...
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Temperature measurement of supercapasitor with the use of ZnO coated microsphere-based fiber-optic sensor - 30 Celsius degrees
Open Research DataApplication of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements of supercapasitor, is presented. Internal temperature of the supercapacitor is investigated in the range between 30°C and 90°C. The supercapacitor temperature was investigated using...
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Temperature measurement of supercapacitor with the use of ZnO coated microsphere-based fiber-optic sensor - 60 Celsius degrees
Open Research DataApplication of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements of supercapasitor, is presented. Internal temperature of the supercapacitor is investigated in the range between 30°C and 90°C. The supercapacitor temperature was investigated using...
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Temperature measurement of supercapacitor with the use of ZnO coated microsphere-based fiber-optic sensor - 40 Celsius degrees
Open Research DataApplication of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements of supercapasitor, is presented. Internal temperature of the supercapacitor is investigated in the range between 30°C and 90°C. The supercapacitor temperature was investigated using...
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Temperature measurement of supercapacitor with the use of ZnO coated microsphere-based fiber-optic sensor - 85 Celsius degrees
Open Research DataApplication of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements of supercapasitor, is presented. Internal temperature of the supercapacitor is investigated in the range between 30°C and 90°C. The supercapacitor temperature was investigated using...
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Temperature measurement of supercapacitor with the use of ZnO coated microsphere-based fiber-optic sensor - 55 Celsius degrees
Open Research DataApplication of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements of supercapasitor, is presented. Internal temperature of the supercapacitor is investigated in the range between 30°C and 90°C. The supercapacitor temperature was investigated using...
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Measurement spectrum obtained with the use of ZnO coated microsphere-based fiber-optic sensor - 100 Celsius degrees
Open Research DataApplication of a microsphere-based fiber-optic sensor with 200 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements between 100°C and 300°C, is presented. The main advantage of integrating a fiber-optic microsphere with a sensing device is the possibility of monitoring the integrity of the sensor...
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AFM (atomic force microscopy) images of borophene after sonication of boron
Open Research DataThese data include AFM (atomic force microscopy) images of borophene obtained after sonication in aceton of boron, collected in order to estimate lateral size of the nanoflakes.
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XRD and electrochemical results for MoO3 films deposited using pulsed laser deposition system
Open Research DataThe attached data contains XRD and electrochemical results for MoO3 films deposited on fluorine-doped tin oxide glasses. Films were deposited using a pulsed laser deposition system at different conditions. Part of the samples was deposited at room temperature and then annealed at 575°C for given times (samples labeled PLD_RT_575C_xmin, where x stands...