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Abstract
The paper presents results of studies on the structure of tetrahedral amorphous carbon films (ta-C) with a thickness in the range from 20 to 280 nm, deposited using pulsed vacuum arc technique with an electromagnetic Venetian blind plasma filter. The results of the phase structure analysis, obtained using visible Raman spectroscopy and UV Raman spectroscopy methods, showed a strong dependence of the results on the presence, on the surface of synthesized thin carbon films, even of a minimum number of microparticles. The presence of microparticles in the deposited coatings strongly affects the accuracy of the measured data, used next for calculation the ID/IG, IT/IG ratios and determination of the G-peak dispersion, for all coating thicknesses, which pointed to significant diversification in sp3-bonds content in deposited films.
Authors (7)
-
V. Zavaleyev
- Koszalin University of Technology Faculty of Technology and Education
-
J. Walkowicz
- Koszalin University of Technology Faculty of Technology and Education
-
Mirosław Sawczak
- Instytut Maszyn Przepływowych PAN Ośrodek Techniki Plazmowej i Laserowej
-
D. Moszyński
- West Pomeranian University of Technology Institute of Chemical and Environment Engineering
-
R. Chodun
- Warsaw University of Technology Faculty of Materials Science
-
K. Zdunek
- Warsaw University of Technology Faculty of Materials Science
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Details
- Category:
- Articles
- Type:
- artykuł w czasopiśmie wyróżnionym w JCR
- Published in:
-
Problems of Atomic Science and Technology
pages 84 - 92,
ISSN: 1562-6016 - Language:
- English
- Publication year:
- 2016
- Bibliographic description:
- Zavaleyev V., Walkowicz J., Sawczak M., Klein M., Moszyński D., Chodun R., Zdunek K.: DETERMINATION OF SP3 FRACTION IN ta-C COATING USING XPS AND RAMAN SPECTROSCOPY// Problems of Atomic Science and Technology. -, nr. 4(104) (2016), s.84-92
- Verified by:
- Gdańsk University of Technology
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