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Silicon microcantilever with impedance sensor
Open Research Data
open access
- A. Zieliński
- J. Ryl
- series: Scanning Probe Microscopies data
The issue of microelectromechanical systems (MEMS) [1] has been enjoying popularity and interest since the 90s of the 20th century. Microcells are one of the simplest devices of this type, but they can be widely used in sensors. There are reports on the possibility of using this type of sensors in the context of such important issues as diagnostics...
AeroSense Measurements: Wind Tunnel EPFL
Open Research Data
open access
Data from wind tunnel tests of Aerosesne measurement system installed on NACA63418 at EPFL wind tunnel.

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Silicon microcantilever with impedance sensor

AeroSense Measurements: Wind Tunnel EPFL