Search results for: MEMS
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Search results for: MEMS
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Silicon microcantilever with impedance sensor
Open Research DataThe issue of microelectromechanical systems (MEMS) [1] has been enjoying popularity and interest since the 90s of the 20th century. Microcells are one of the simplest devices of this type, but they can be widely used in sensors. There are reports on the possibility of using this type of sensors in the context of such important issues as diagnostics...
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AeroSense Measurements: Wind Tunnel EPFL
Open Research DataData from wind tunnel tests of Aerosesne measurement system installed on NACA63418 at EPFL wind tunnel.