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Wyniki wyszukiwania dla: SUBSTRATE INTEGRATED SQUARE CAVITY, FREQUENCY RECONFIGURABLE, SELF-QUADRUPLEXING ANTENNA, MICROFLUIDIC
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Chemical composition of tellurium oxides thin films deposited by magnetron sputtering method
Dane BadawczeThin films were prepared by radio frequency reactive magnetron sputtering technique. Metallic Te target was sputtered for about 45 min in argon-oxygen atmosphere what resulted in 300 nm film thickness deposition. The pressure in the chamber was below 0.2 Pa and substrate was heated at 200 °C. The distance between sputtered target and the Corning 1737...