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Implementation of SiN thin film in fiber-optic sensor working in telecommunication range of wavelengths
Abstract
Mirrors are used in optical sensors and measurement setups. This creates a demand for mirrors made of new materials and having various properties tailored to specific applications. In this work, we propose silicon covered with a thin silicon nitride layer as a mirror for near-infrared measurements. SiN layer was deposited on a standard silicon wafer with a Low-Pressure Chemical Vapor Deposition furnace. Then, the created layer was investigated using ellipsometry and scanning electron microscope. Subsequently, the mirror was used as a reflecting surface in a Fabry–Perot fiber-optic interferometer. The mirror performance was investigated for wavelengths used in telecomunication (1310 nm and 1550 nm) and then compared with results obtained with the same measurement setup, with a silver mirror instead of silicon covered with SiN, as reference. Results showed that the proposed mirror can replace the silver one with satisfying results for investigated wavelengths.
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Authors (7)
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Bartłomiej Stonio
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Marcin Juchniewicz
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Michał Kruczkowski
Cite as
Full text
- Publication version
- Accepted or Published Version
- DOI:
- Digital Object Identifier (open in new tab) 10.1038/s41598-021-00195-9
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Details
- Category:
- Articles
- Type:
- artykuły w czasopismach
- Published in:
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Scientific Reports
no. 11,
ISSN: 2045-2322 - Language:
- English
- Publication year:
- 2021
- Bibliographic description:
- Pawłowska S., Gierowski J., Stonio B., Juchniewicz M., Ficek M., Kruczkowski M., Szczerska M.: Implementation of SiN thin film in fiber-optic sensor working in telecommunication range of wavelengths// Scientific Reports -Vol. 11,iss. 1 (2021), s.22402-
- DOI:
- Digital Object Identifier (open in new tab) 10.1038/s41598-021-00195-9
- Sources of funding:
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- IDUB
- Statutory activity/subsidy
- Project QUantum-effect-based Nanosensing and imaging: Novel glass-diamond photonic approach for the next generation biodiagnostic applications
- Verified by:
- Gdańsk University of Technology
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