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Surface quality control of a thin SiN layer by optical measurements

Abstract

Fiber optic interferometers have a wide range of applications, including biological and chemical measurements. Nevertheless, in the case of a reflective interferometer setup, standard silver mirrors cannot be used in every measurement, due to their chemical activity. This work investigates the surface quality of a thin optical layer of silicon nitride (SiN), which can serve as an alternative material for silver mirrors. We present measurements carried out with a Fabry-Perot fiber-optic interferometer working in a reflective mode. Measurement results allow us to determine the surface quality of the investigated layer.

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Accepted or Published Version
DOI:
Digital Object Identifier (open in new tab) 10.4302/plp.v13i3.1096
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Details

Category:
Articles
Type:
artykuły w czasopismach
Published in:
Photonics Letters of Poland no. 13, pages 61 - 63,
ISSN: 2080-2242
Language:
English
Publication year:
2021
Bibliographic description:
Gierowski J., Pawłowska S.: Surface quality control of a thin SiN layer by optical measurements// Photonics Letters of Poland -Vol. 13,iss. 3 (2021), s.61-63
DOI:
Digital Object Identifier (open in new tab) 10.4302/plp.v13i3.1096
Sources of funding:
  • Statutory activity/subsidy
  • IDUB
Verified by:
Gdańsk University of Technology

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