Abstrakt

Purpose: This paper presents the results of investigations on morphology and optical
properties of the prepared aluminium oxide thin films
Design/methodology/approach: Thin films were prepared with use of sol-gel spin
coating method. The changes of surface morphology were observed in topographic pictures
performed with the atomic force microscope AFM. Obtained roughness coefficients values
were generated with XEI Park Systems software. The thickness distribution were checked
with spectroscopic ellipsometry with use of mapping mode. The optical reflection spectra
were measured with UV-Vis spectrophotometry.
Findings: Results and their analysis show that the sol-gel method allows the deposition of
homogenous thin films of Al2O3 with the desired geometric characteristics and good optical
properties.
Practical implications: The technology of sol-gel aluminium oxide thin films deposition
causes that mentioned thin films are good potential material for optics, optoelectronics and
photovoltaics.
Originality/value: The paper presents some results of investigations on aluminium oxide
thin films prepared with sol-gel spin coating method on polished monocrystalline silicon

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