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Ultrasonic spectroscopy of silicon single crystal

Abstrakt

Specimens of Si single crystals with different crystal orientation [100] and [110] were studied by the electro-ultrasonic spectroscopy (EUS) and Resonant Ultrasonic Spectroscopy (RUS). A silicon single crystal is an anisotropic crystal, so its properties are different in different directions in the material relative to the crystal orientation. EUS is based on interaction of two signals: electric AC signal and ultrasonic signal, which are working on different frequencies. The ultrasonic wave affects the electron and ions transport in the structures and the electrical signal created due to the interaction between the ultrasonic wave and charge current carriers is proportional to the density of structure defects. RUS enables to measure natural frequencies of free elastic vibrations of a simply shaped specimens by scanning a selected frequency range including the appropriate resonances of the measured specimens.

Informacje szczegółowe

Kategoria:
Publikacja w czasopiśmie
Typ:
artykuł w czasopiśmie wyróżnionym w JCR
Opublikowano w:
Metrology and Measurement Systems nr XVIII,
ISSN: 0860-8229
Język:
angielski
Rok wydania:
2011
Opis bibliograficzny:
Sedlak P., Tofel P., Sedlakova V., Majzner J., Sikula J., Hasse L.: Ultrasonic spectroscopy of silicon single crystal// Metrology and Measurement Systems. -Vol. XVIII, nr. No. 4 (2011),
Weryfikacja:
Politechnika Gdańska

wyświetlono 6 razy

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