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Abstrakt
In this paper we present results of preliminary research of using nitrogen-doped diamond (NDD) films as reflective layer in Fabry-Pérot interferometer. NDD films were deposited on Si substrates by Microwave Plasma Enhanced Chemical Vapor Deposition (MPECVD) with the use of CH4, H2 and N2 gas mixtures. During deposition process methane flow rate varied while nitrogen flow was constant. We performed series of measurements which showed that NDD can be used as a mirror in Fabry-Pérot interferometer. The best signal visibility and repeatability of measurements were obtained for sample made with 3 sccm methane flow rate.
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Autorzy (6)
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Sankaran Kamatchi
- Hasselt University Institute for Materials Research (IMO)
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Ken Haenen
- Hasselt University Institute for Materials Research (IMO)
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Informacje szczegółowe
- Kategoria:
- Aktywność konferencyjna
- Typ:
- materiały konferencyjne indeksowane w Web of Science
- Opublikowano w:
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Proceedings of SPIE
nr 10716,
strony 1 - 6,
ISSN: 0277-786X - Tytuł wydania:
- Saratov Fall Meeting on Optical Technologies in Biophysics and Medicine XIX / 5th International Symposium on Optics and Biophotonics strony 1 - 6
- Język:
- angielski
- Rok wydania:
- 2018
- Opis bibliograficzny:
- Kosowska M., Majchrowicz D., Kamatchi S., Ficek M., Szczerska M., Haenen K..: Nitrogen-doped diamond thin films: potential application in Fabry-Pérot interferometer, W: Saratov Fall Meeting on Optical Technologies in Biophysics and Medicine XIX / 5th International Symposium on Optics and Biophotonics, 2018, ,.
- DOI:
- Cyfrowy identyfikator dokumentu elektronicznego (otwiera się w nowej karcie) 10.1117/12.2314445
- Weryfikacja:
- Politechnika Gdańska
Powiązane datasety
- dane badawcze Distance measurement by the low coherent interferometer
- dane badawcze Distance measurement by the low coherent interferometer with NND layer (the source wavelegth 1310 nm)
- dane badawcze Distance measurement with the low coherent interferometer with silver mirror (the source wavelegth 1310 nm) - 20 um (serie 1)
- dane badawcze Distance measurement with the low coherent interferometer with silver mirror (the source wavelegth 1310 nm) - 80 um (serie 1)
- dane badawcze Distance measurement with the low coherent interferometer with silver mirror (the source wavelegth 1310 nm) - 170 um (serie 1)
- dane badawcze Distance measurement with the low coherent interferometer with silver mirror (the source wavelegth 1310 nm) - 140 um (serie 1)
- dane badawcze Distance measurement with the low coherent interferometer with silver mirror (the source wavelegth 1310 nm) - 50 um (serie 1)
- dane badawcze Distance measurement with the low coherent interferometer with silver mirror (the source wavelegth 1310 nm) - 130 um (serie 1)
- dane badawcze Distance measurement with the low coherent interferometer with silver mirror (the source wavelegth 1310 nm) - 120 um (serie 1)
- dane badawcze Distance measurement with the low coherent interferometer with silver mirror (the source wavelegth 1310 nm) - 90 um (serie 1)
wyświetlono 167 razy
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