Nitrogen-doped diamond thin films: potential application in Fabry-Pérot interferometer - Publikacja - MOST Wiedzy

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Nitrogen-doped diamond thin films: potential application in Fabry-Pérot interferometer

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In this paper we present results of preliminary research of using nitrogen-doped diamond (NDD) films as reflective layer in Fabry-Pérot interferometer. NDD films were deposited on Si substrates by Microwave Plasma Enhanced Chemical Vapor Deposition (MPECVD) with the use of CH4, H2 and N2 gas mixtures. During deposition process methane flow rate varied while nitrogen flow was constant. We performed series of measurements which showed that NDD can be used as a mirror in Fabry-Pérot interferometer. The best signal visibility and repeatability of measurements were obtained for sample made with 3 sccm methane flow rate.

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Monika Kosowska, Daria Majchrowicz, Sankaran Kamatchi, Mateusz Ficek, Małgorzata Jędrzejewska-Szczerska, Ken Haenen. (2018). Nitrogen-doped diamond thin films: potential application in Fabry-Pérot interferometer, 10716, 1-6. https://doi.org/10.1117/12.2314445

Informacje szczegółowe

Kategoria:
Publikacja w czasopiśmie
Typ:
publikacja w in. zagranicznym czasopiśmie naukowym (tylko język obcy)
Opublikowano w:
Proceedings of SPIE nr 10716, strony 1 - 6,
ISSN: 0277-786X
Język:
angielski
Rok wydania:
2018
Opis bibliograficzny:
Kosowska M., Majchrowicz D., Kamatchi S., Ficek M., Jędrzejewska-Szczerska M., Haenen K.. Nitrogen-doped diamond thin films: potential application in Fabry-Pérot interferometer. Proceedings of SPIE, 2018, Vol. 10716, , s.1-6

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