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Wyniki wyszukiwania dla: MICROMECHANICAL DEVICES

  • Silicon microcantilever with impedance sensor

    Dane Badawcze
    open access - seria: Scanning Probe Microscopies data

    The issue of microelectromechanical systems (MEMS) [1] has been enjoying popularity and interest since the 90s of the 20th century. Microcells are one of the simplest devices of this type, but they can be widely used in sensors. There are reports on the possibility of using this type of sensors in the context of such important issues as diagnostics...