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Search results for: MEMS
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Barometr MEMS Freescale MPL115A1 SPI
PublicationW artykule przedstawiono sposób komunikacji z czujnikiem Freescale MPL115A1 (wersja SPI) wykonanym w technologii MEMS oraz konwersji otrzymywanych z niego danych.
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MEMS Gyro in the Context of Inertial Positionning
PublicationThe article undertake some vital aspect in geodesy, namely an inertial positioning problem using MEMS. Although MEMS inertial sensors offer affordable, appropriately scaled units, and though their inherent measurement noise can be relatively easily mitigated, there are still parameters due to they are not currently capable of meeting all requirements for the accurate and precise inertial positioning. The article presents crucial...
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MEMS based voice message system for elevators
PublicationW artykule przedstawiono implementację systemu głosowych komunikatów w windach. Prezentowany system posiada unikalną cechę polegającą na tym, że do działania nie potrzebuje połączenia z systemem sterującym windy. Zasilany z baterii lub akumulatorów może być zamontowany w ścianie windy, wymaga tylko prostej kalibracji. System oparty jest na akcelerometrach MEMS dokonujących pomiaru przeciążeń w kabinie windy. W artykule przedstawiono...
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MEMS Technology Evaluation for Submerged Vehicle Navigation
PublicationAnalysis of some vital aspects of inertial navigation using MEMS. The paper presents a few aspects of MEMS gyro errors, and their estimation process in the context of INS processing flow. These errors have a serious impact on overall inertial system performance. The results of undertaken researches in that area, and pointing out the main difficulties behind the INS when using a few top MEMS technologies, including sophisticated...
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A prototype femtosecond laser system for MEMS fabrication
Publicationn this article, the concept of a prototype femtosecond laser micromachining system and a femtosecond solid-state Yb:KYW laser is presented. Ultrashort laser pulses have many advantages over the long pulses in laser micromachining, due to their unique ability to interact with different materials without transferring heat to them. This allows very precise and pure laser-processing, clean cuts and sharp edges. A femtosecond laser...
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MEMS Technology Quality Requirements as Applied to Multibeam Echosounder
PublicationSmall, lightweight, power-efficient, and low-cost microelectromechanical system (MEMS) inertial sensors and microcontrollers, available in the market today, help reduce the instability of Multibeam Sonars. Current MEMS inertial measurement units (IMUs) come in many shapes, sizes, and costs — depending on the application and performance required. Although MEMS inertial sensors offer affordable, appropriately scaled units, they are...
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Gait Recognition: A Challenging Task for MEMS Signal Identification
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Detection of the Incoming Sound Direction Employing MEMS Microphones and the DSP
PublicationA 3D acoustic vector sensor based on MEMS microphones and its application to road traffic monitoring is presented in the paper. The sensor is constructed from three pairs of digital MEMS microphones, mounted on the orthogonal axes. Signals obtained from the microphones are used to compute sound intensity vectors in each direction. With this data, it is possible to compute the horizontal and vertical angle of an incoming sound....
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Projekt robotycznego mikro-nadgarstke dla potrzeb chirurgii laparoskopowej wykonany w technologii MEMS = The project of robotic micro-wrist for the laparoscopic surgery, made in MEMS technology
PublicationArtykuł przedstawia proces projektowania robotycznego mikro-nadgarstka dla potrzeb chirurgii laparoskopowej przy zastosowaniu technologii MEMS (z ang. MicroElectroMechanicalSystems) i oryginalnej architektury 3D o trzech stopniach swobody. Mikro-laparoskopia, inaczej igłoskopia (z ang. needlescoopy), jest obecnie jednym z nowo kształtujących się tematów w dziedzinie robotyki medycznej o perspektywach szybkiego rozwoju. Operacja...
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Calibration of acoustic vector sensor based on MEMS microphones for DOA estimation
PublicationA procedure of calibration of a custom 3D acoustic vector sensor (AVS) for the purpose of direction of arrival (DoA) estimation, is presented and validated in the paper. AVS devices working on a p-p principle may be constructed from standard pressure sensors and a signal processing system. However, in order to ensure accurate DoA estimation, each sensor needs to be calibrated. The proposed algorithm divides the calibration process...
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Fabrication and characterization of boron-doped nanocrystalline diamond-coated MEMS probes
PublicationFabrication processes of thin boron-doped nanocrystalline diamond (B-NCD) films on silicon-based micro- and nano-electromechanical structures have been investigated. Nanocrystalline boron doped -diamond (B-NCD) films were deposited using Microwave Plasma Assisted Chemical Vapour Deposition (MW PA CVD) method. The variation of B-NCD morphology, structure and optical parameters were particularly investigated. The use of truncated...
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Zastosowanie nanosekundowej mikroobróbki laserowej do wykonywania metalowych elementów urządzeń MEMS
PublicationW niniejszym artykule omówiono zastosowanie mikroobróbki laserowej impulsami nanosekundowymi do wykonywania metalowych elementów urządzeń MEMS (microelectromechanical systems). Omówiono ogólnie nanosekundową mikroobróbkę laserową materiałów metalowych oraz przedstawiono przykłady elementów urządzeń MEMS wykonanych tą techniką. Przedstawiono także problem degradacji obrabianego materiału podczas nanosekundowej mikroobróbki laserowej....
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STUDY OF ARRAY OF MEMS INERTIAL MEASUREMENT UNITS UNDER QUASI-STATIONARY AND DYNAMIC CONDITIONS
PublicationA measurement system includes all components in a chain of hardware and software that leads from a measured variable to processed data. In that context, the type and quality of the sensors or measuring devices are critical to any measurement system. MEMS/IMU sensors lag behind leading technologies in this respect, but the MEMS/IMU performance rapidly changes while is relatively inexpensive. For this reason, the paper proposes...
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Road Tests of the Positioning Accuracy of INS/GNSS Systems Based on MEMS Technology for Navigating Railway Vehicles
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Inertial Sensors Applications in Underwater Measurements
PublicationOver the past decades microelectromechanical systems (MEMS) researchers have demonstrated a number of microsensors for almost every possible sensing modality, including attitudes. Current MEMS inertial measurement units (IMU) come in many shapes, sizes, and costs — depending on the application, and performance required. MEMS sensors have proved and demonstrated performance exceeding those of their macroscale counterpart sensors. In...
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Technologia biomems - przegląd zastosowań
PublicationThe paper reviews the issues related to technology, MEMS (Micro-Electro Systems-Mechanical) in the context of applications in biotechnology and biomedical systems. Systems of this type, with applications in biology and medicine, have the name of our common BioMEMS systems. This pertains to a wide range of technology BioMEMS. The aim of this study is to determine future medical MEMS microphones with particular emphasis on their...
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Evaluation of position estimation based on accelerometer data
PublicationThe paper concerns the problem of integrating data from accelerometers. A suitable model of a MEMS accelerometer is presented which is a part of inertial measurement units (IMU). Such units allow to measure orientation as well as to localize systems. They also appear to be applicable for systems positioning. The main purpose of the paper is to discuss conditions that must be satisfied to calculate the location of the sensor by...
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Sterowane elektrycznie pojemności stosowane w mikroelektronice
PublicationPraca prezentuje aktualny stan wiedzy o stosowanych w mikroelektronice elektrycznie sterowanych zmiennych pojemnościach. Omawiana jest budowa i podstawowe charakterystyki trzech rodzajów takich pojemności: diodowych (złączowych), MEMS i BST na podstawie przeglądu publikacji naukowych z lat 1964-2004.
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Nonlocal Models of Plates and Shells with Applications in Micro- and Nanomechanics
PublicationNowadays, the use of small-scale structures in micro/nanomachines has become more and more widespread. The most important applications of such small-sized parts are in micro-electro-mechanical systems (MEMS) as well as nano-electro-mechanical systems (NEMS) as actuators, sensors, energy harvesters. For example, nanosensors are nanoscale devices that measure physical quantities and convert these to signals that can be detected and...
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Evaluating the mobile robot positions using accelerometer data
PublicationThis paper analyzes the problem of determining the position of a robot using an accelerometer, which is an essential part of inertial measurement units (IMU). The information gained from such a gauge, however, requires double integration of sensor data. To assure an expected effect, a mathematical model of a low-cost accelerometer of the MEMS type is derived. Moreover, in order to improve the performance of positioning based on...