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Wyniki wyszukiwania dla: thin diamond films
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THIN SOLID FILMS
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The use of thin diamond films in fiber optic low-coherence interferometers”
PublikacjaIn this paper we present the use of thin diamond films in fiber-optic low-coherence interferometers. Two kinds of diamond surfaces were used: undoped diamond film and boron-doped diamond film. They were deposited on glass plates as well as silicon layers. A conventionally used mirror was used as a reference layer. Diamond films were deposited using Microwave Plasma Enhanced Chemical Vapour Deposition (μPE CVD) system. Measurements...
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Enhanced boron doping of thin diamond films grown in deuterium-rich microwave plasma
PublikacjaThe boron-doped diamond thin films were growth in deuterium rich microwave plasma in CVD process. The mechanism of influence of plasma composition on boron doping level was studied using optical emission spectroscopy. Deuterium rich plasma results in an increased dissociation of B2H6 precursor and intense boron-radicals' production. In consequence, a higher doping level of diamond films was observed by means of Laser Induced Breakdown...
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Application of thin diamond films in low-coherence fiber-optic Fabry Pérot displacement sensor
PublikacjaThe novel fiber-optic low coherence sensor with thin diamond films is demonstrated. The undoped and boron-doped diamond films were elaborated by the use of the microwave plasma enhanced chemical vapor deposition (μPE CVD) system. The optical signal from the Fabry–Pérot cavity made with the application of those thin films is sensitive to displacement. The sensor characterization was made in the range of 0–600 μm. The measurements...
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Thin CVD diamond films - synthesis, properties, applications
PublikacjaThe basic model of diamond films growth, in the low pressure synthesis, deposition from the CVD gas phase, is the mixture of hydrocarbon gas in presence with activated hydrogen and its nucleation on the substrate as a result of pyrolysis reaction. It allows to cross the great energetic barrier between graphite and diamond. High pressure and temperature are replaced by change of electronic structure of atoms into gas precursors...
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Local impedance imaging of boron-doped polycrystalline diamond thin films
PublikacjaLocal impedance imaging (LII) was used to visualise surficial deviations of AC impedances in polycrystalline boron-doped diamond (BDD). The BDD thin film electrodes were deposited onto the highly doped silicon substrates via microwave plasma-enhanced CVD. The studied boron dopant concentrations, controlled by the [B]/[C] ratio in plasma, ranged from 1 × 1016 to 2 × 1021 atoms cm−3. The BDD films displayed microcrystalline structure,...
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Local impedance imaging of boron-doped polycrystalline diamond thin films
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Nitrogen-doped diamond thin films: potential application in Fabry-Pérot interferometer
PublikacjaIn this paper we present results of preliminary research of using nitrogen-doped diamond (NDD) films as reflective layer in Fabry-Pérot interferometer. NDD films were deposited on Si substrates by Microwave Plasma Enhanced Chemical Vapor Deposition (MPECVD) with the use of CH4, H2 and N2 gas mixtures. During deposition process methane flow rate varied while nitrogen flow was constant. We performed series of measurements which showed...
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Optical and electrical properties of boron doped diamond thin conductive films deposited on fused silica glass substrates
PublikacjaThis paper presents boron-doped diamond (BDD) film as a conductive coating for optical and electronic purposes. Seeding and growth processes of thin diamond films on fused silica have been investigated. Growth processes of thin diamond films on fused silica were investigated at various boron doping level and methane admixture. Two step pre-treatment procedure of fused silica substrate was applied to achieve high seeding density....
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Characterization of Optical and Electrical Properties of Transparent Conductive Boron-Doped Diamond thin Films Grown on Fused Silica
PublikacjaA conductive boron-doped diamond (BDD) grown on a fused silica/quartz has been investigated. Diamond thin films were deposited by the microwave plasma enhanced chemical vapor deposition (MW PECVD). The main parameters of the BDD synthesis, i.e. the methane admixture and the substrate temperature were investigated in detail. Preliminary studies of optical properties were performed to qualify an optimal CVD synthesis and film parameters...