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DIAMOND AND RELATED MATERIALS
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Diamond surface modification following thermal etching of Si supported hydrogenated diamond films by DBr
PublikacjaZbadano, wykorzystując spektroskopię oscylacyjną (HREELS - High Resolution Electron Energy Loss Spectroscopy) modyfikacje chemiczne powierzchni wodorowanego diamentu, umieszczonego na podkładzie krzemowym i wystawionego na działanie DBr a następnie podgrzanego do temp. powyżej 600 st.K. Przedstawiona procedura powoduje tworzenie się węglika krzemu SiC na powierzchni warstwy diamentowej, co jest widoczne na widmie HREEL jako dwa...
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Thin CVD diamond films - synthesis, properties, applications
PublikacjaThe basic model of diamond films growth, in the low pressure synthesis, deposition from the CVD gas phase, is the mixture of hydrocarbon gas in presence with activated hydrogen and its nucleation on the substrate as a result of pyrolysis reaction. It allows to cross the great energetic barrier between graphite and diamond. High pressure and temperature are replaced by change of electronic structure of atoms into gas precursors...
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In-situ optical diagnostics of boron-doped diamond films growth
PublikacjaInterferometry is a desirable method for in-situ measurement of thin, dielectric film growth, as it don't modify conditions of film deposition. Here we present interferometrical measurements of thickness of doped diamond films during Chemical Vapor Deposition (CVD) process. For this purpose we used a semiconductor laser with a 405nm wavelength. Additional ex-situ measurement using spectral interferometry and ellipsometry...
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Studies on optical transmittance of boron-doped nanocrystalline diamond films
PublikacjaThickness is one of the most important parameters in many applications using thin layers. This article describes thickness determination of a boron-doped nanocrystalline diamond (NCD) grown on fused silica glass. A spectroscopic measurement system has been used. A high refractive index (2.3 at 550nm) was achieved for NCD films. The thickness of NCD samples has been determined from the transmission spectrum.
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The use of thin diamond films in fiber optic low-coherence interferometers”
PublikacjaIn this paper we present the use of thin diamond films in fiber-optic low-coherence interferometers. Two kinds of diamond surfaces were used: undoped diamond film and boron-doped diamond film. They were deposited on glass plates as well as silicon layers. A conventionally used mirror was used as a reference layer. Diamond films were deposited using Microwave Plasma Enhanced Chemical Vapour Deposition (μPE CVD) system. Measurements...
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Local impedance imaging of boron-doped polycrystalline diamond thin films
PublikacjaLocal impedance imaging (LII) was used to visualise surficial deviations of AC impedances in polycrystalline boron-doped diamond (BDD). The BDD thin film electrodes were deposited onto the highly doped silicon substrates via microwave plasma-enhanced CVD. The studied boron dopant concentrations, controlled by the [B]/[C] ratio in plasma, ranged from 1 × 1016 to 2 × 1021 atoms cm−3. The BDD films displayed microcrystalline structure,...
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Local impedance imaging of boron-doped polycrystalline diamond thin films
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INDUSTRIAL DIAMOND REVIEW
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Optical properties of boron-doped nanocrystalline diamond films studied by spectroscopic ellipsometry
PublikacjaThe optical properties of boron-doped nanocrystalline diamond films, coated using Microwave Plasma Enhanced Chemical Vapour Deposition (μPE CVD) system, were analyzed by spectroscopic ellipsometry. Diamond films were deposited on silicon substrates. The ellipsometry data (refractive index (n(λ)), extinction coefficient (k(λ)) were modeled using dedicated software. Evolution of the optical structure with boron doping was observed...