Wyniki wyszukiwania dla: magnetron sputtering - MOST Wiedzy

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Wyniki wyszukiwania dla: magnetron sputtering

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Wyniki wyszukiwania dla: magnetron sputtering

  • Chemical composition of tellurium oxides thin films deposited by magnetron sputtering method

    Dane Badawcze
    open access

    Thin films were prepared by radio frequency reactive magnetron sputtering technique. Metallic Te target was sputtered for about 45 min in argon-oxygen atmosphere what resulted in 300 nm film thickness deposition. The pressure in the chamber was below 0.2 Pa and substrate was heated at 200 °C. The distance between sputtered target and the Corning 1737...

  • Structural analysis of the tellurium dioxide thin films

    Dane Badawcze
    open access

    TeO2 thin films were deposited by magnetron sputtering method. After deposition, amorphous samples were annealed at various temperatures. Influence of annealing temperature on a presence of crystalline phase was investigated.

  • XRD analysis of the tellurium dioxide thin films

    Dane Badawcze
    open access

    Tellurium dioxide thin films were deposited by magnetron sputtering method. The XRD analysis of the films annealed at 200, 500, 650 and 700 celsius degree showed appearing of crystalline phase in a higher temeratures.

  • Dewetting of silver films detected by XPS method

    Dane Badawcze
    open access

    Dewetting of silver thin films was detected by XPS method. Thin metallic films were deposited by magnetron sputtering method. Formation of nanostructures , as a result of thermal annealing, was confirmed by SEM microscope. For comparision three samples were measured. Bulg gold, as-deposited silver film with thickness of 3 nm and nanostructures.

  • Optical transmission of the Niobium thin films

    Dane Badawcze
    open access

    Niobium thin films with a thickness of 200nm were deposited n a Corning glass substrate by magnetron sputtering method. The optical transmission spectra in a visible light range were.recorded. Investigations showed a good optical transmission thru the layers for each samples, annealed at various temperatures. For measurements samples annealed at 500,...

  • Formation of gold nanostructures detected by XPS method

    Dane Badawcze
    open access

    Gold nanostructers were manufactured by thermal dewetting of thin film. Film with thickness of 2.8 nm was deposited by magnetron sputtering method. As a result of annealing at 550 deg, nanostructures appear. Bulk gold, as-deposited gold film and metallic nanostructures were measured by XPS method. 

  • Chemical investigations of the MoO3 doped by K films deposited FTO

    Dane Badawcze
    open access

    MoO3 thin films were synthesized via thermal annealing of thin, metallic Mo films deposited onto the FTO substrate using a magnetron sputtering system. The influence of photointercalation of alkali metal cation (K+) into the MoO3 structure on the photoelectrochemical properties of the molybdenum trioxide films was investigated. The chemical characterisation...

  • SEM inwestigation of the silver nanostructures

    Dane Badawcze
    open access

    Silver thin films with a thickness of 1nm, 3nm, 5nm, 7nm and 9nm were deposited by a table-top magnetron sputtering unit in a pure argon plasma from a high-purity silver target. Silicon wafers was used as a substrates. As-deposired films were annealed in Ar atmosphere at 550 Celsius degree for 15 minutes.As a result of annealing, Ag nanostructures formed...

  • Luminescence of TeO2:Eu thin films

    Dane Badawcze
    open access

    Tellurium dioxide doped by europium thin films were deposited by magnetron sputtering method and simultaneously heated at 200 oC. Presence of Eu ions and their valence states was confirmed by X-ray photoemission spectroscopy measurements. The structure of the films as well as the influence of europium dopant on crystalline structure of the films was...

  • Depth profile of the gold-silver bimetallic structures

    Dane Badawcze
    open access

    Silver and gold bimetallic layers were deposited on a silicon substrate by magnetron sputtering method. Both, Au and Ag layers had 3 nm of thickness. That prepared nanostructures were measured by XPS method. To obtain a depth profile of chemical composition, an Argon ion (Ar+) gun was used for etching surface of sample. Each cycle of etching takes 30...

  • Electrical measurements of the dewetting of metal thin films

    Dane Badawcze
    open access

    In situ observations of dewetting of thin films is very complicated. One of the method, that helps to observe it, could be electrical measurements. For experiments, thin gold, silver and gold-silver nanoalloy films were deposited by magnetron sputtering method. Films were deposited on a Corning glass substrates. Samples were measured by four point method...

  • Structure and optical measurements of Eu doped tellurium oxide thin films

    Thin films were deposited by magnetron sputtering method and simultaneously heated at 200 oC. Presence of Eu ions and their valence states was confirmed by X-ray photoemission spectroscopy measurements. The structure of the films as well as the influence of europium dopant on crystalline structure of the films was examined by X-ray diffraction method. ...

  • XRD for molybdenum sulfide modified with nickel or platinum nanoparticles

    Dane Badawcze
    open access

    The presented data showcases the results of XRD analysis conducted on molybdenum sulfide modified with nickel or platinum nanoparticles . The MoS2 was prepared on the TiO2 nanotube substrates via a facile hydrothermal method, followed by the deposition by magnetron sputtering of Ni or Pt nanoparticles on the MoS2 surface. Structural characterization...

  • Investigation of the uniformity of TeO2:Eu layer

    Dane Badawcze
    open access

    TeO2 doped by Eu thin films manufactured by magnetron sputtering method were measured by XPS method.  Te-Eu mosaic target with diameter of 50.8 mm was sputtered for about 45 min in argon-oxygen atmosphere what resulted in 300 nm film thickness deposition. The pressure in the deposition chamber was below 0.2 Pa and substrate was heated  at 200 oC during...

  • Optical properties of tellurium dioxide thin films

    Dane Badawcze
    open access

    TeO2 and TeO2 doped by Eu thin films manufactured by magnetron sputtering method were measured by optical spectroscopy.  Metallic Te target and Te-Eu mosaic target with diameter of 50.8 mm were sputtered for about 45 min in argon-oxygen atmosphere what resulted in 300 nm film thickness deposition. The pressure in the chamber was below 0.2 Pa and substrate...

  • SEM images of tge gold nanostructures on silicon

    Dane Badawcze
    open access

    Au nanostructures were prepared on Si(111) as a substrate. The substrates (1 × 1 cm2  of area) were cleaned with acetylacetone and then rinsed in ethanol. Thin Au films (with thicknesses in a range of 1.7–5.0 nm) were deposited using a table-top dc magnetron sputtering coater (EM SCD 500, Leica) under pure Ar plasma conditions (Argon, Air Products 99.999%)....

  • Depth profile of the chemical composition of the Au-Ag multilayers

    Dane Badawcze
    open access

    Silver and gold multilayers were deposited on a silicon substrate by magnetron sputtering method. Both type, Au and Ag thin films had 2 nm of thickness. Totally structure had thickness of 6 nm (Au-Ag-Au). That prepared multilayers were measured by XPS method. To obtain a depth profile of chemical composition, an Argon ion (Ar+) gun was used for etching...

  • Plasmon resonance in a TiO2-Au NPs structures

    Dane Badawcze
    open access

    Investigated structures were deposited on a pre cleaned Corning 1737 glass substrates, which provided flat optical transmission characteristics and high transmission coefficient in a visible light range. Plasmonic nanostructures were formed as a result of thermal annealing. For gold films with thickness of 2.8 nm depiction a table-top dc magnetron sputtering...

  • Chemical analysis of the Au-Ag nanoaloys

    Dane Badawcze
    open access

    The nanostructures of AuAg nanoalloys were prepared by sequential sputtering of gold and silver thin films.  Single layer thickness was usually 2.8 nm were deosted by magnetron sputtering method in a Ar plasma. As deposited layers were annealed in Ar atmosphere at 550 degress for 15 minutes. For XPS measurements five samples were selected: pure gold...

  • X-Ray diffraction of the metallic nanostructures

    Dane Badawcze
    open access

    Metallic nanostructures (gold and silver) were manufactured as a thermal annealing of gold or silver thin film. Gold films with thickness of 2.8 nm were deposited on a silicon substrates using a table-top dc magnetron sputtering coater (EM SCD 500, Leica), equipped with quartz microbalance for in-situ thickness measurements. Films were deposited from...

  • SEM images of dewetted gold films

    Dane Badawcze
    open access

    Gold nanostructures were prepared on silicon - Si(111) as a substrate. as a result of dewetting process. Thin golds films were deposited using a table-top dc magnetron sputtering coater under pure Ar plasma conditions . The Au target had 99.99% purity, the rate of Au layer deposition was about 0.4 nm·s−1 and the incident power was 32 W. The thickness...

  • Oxidation of silver nanostructures

    Dane Badawcze
    open access

    Silver nanostructures were prepared on  Si substrate. Thin Ag films (2 and 6 nm thickness) were deposited using a tabletop dc magnetron sputtering coater (EM SCD 500, Leica) in pure Ar plasma. The Ag target was of 99.99% purity, the rate of layer deposition was about 0.4 nm·s−1 , and the incident power was in the range of 30–40 W. The layer thickness...

  • Comparison of XPS spectra of Ag3d for silver nanostructures and bulk material

    Dane Badawcze
    open access

    Ag nanostructures were prepared on borosilicate glass (Corning 1737F) and Si substrates. In both cases, the substrateswere cleaned with acetylacetone and then rinsed in ethanol. Thin Ag films (2 and 6 nm thickness) were deposited using a tabletop dc magnetron sputtering coater (EM SCD 500, Leica) in pure Ar plasma (argon, Air Products 99.999%). The...

  • Plasmon resonance in gold-silver nanoalloys

    Dane Badawcze
    open access

    Surface plasmon resonance (SPR) can lead to improve or formation a new linear or nonlinear optical phenomena. Especially it can enhance a light emission from luminescence materials. The presence of metal nanostructures or nanoparticles is necessary to excitation of the SPR. It is well known that gold and silver nanostructures exhibit plasmon resonance...

  • Investigation of plasmon resonance in a silver nanoparticles

    Dane Badawcze
    open access

    Silver nanostructures were prepared on borosilicate glass (Corning 1737F) substrates. Thin Ag films (1–9 nm thickness) were deposited using a table-top dc magnetron sputtering coater (EM SCD 500, Leica) in pure Ar plasma (argon, Air Products 99.999%). The Ag target was of 99.99% purity, the rate of layer deposition was about 0.4 nm·s−1, and the incident...

  • Formation of gold anostructures detected by SEM microscope

    Dane Badawcze
    open access

    Gold nanostructures were prepared on silicon - Si(111) as a substrate. The substrates (1 × 1 cm2  of area) were cleaned with acetylacetone and then rinsed in ethanol. Thin Au films (with thicknesses in a range of 1.7–5.0 nm) were deposited using a table-top dc magnetron sputtering coater (EM SCD 500, Leica) under pure Ar plasma conditions (Argon, Air...