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Wyniki wyszukiwania dla: microwave plasma, diamond, optical fibres
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Nucleation and growth of CVD diamond on fused silica optical fibres with titanium dioxide interlayer
PublikacjaNucleation and growth processes of thin diamond films on fused silica optical fibres have been investigated. Fibres were coated with diamond film using microwave plasma enhanced chemical vapour deposition (µPE CVD) system. Since the growth of diamond on the fused silica glass requires high seeding density, two types of glass pre-treatment were applied: titanium dioxide (TiO2) interlayer deposition and sonication in nanodiamond...
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Nanocrystalline CVD Diamond Coatings on Fused Silica Optical Fibres: Optical Properties Study
Publikacjapre-treatment by dip coating in two detonation nanodiamond (DND) seeding media has been studied. The DND suspension in ethyl alcohol and dispersion of DND in dimethyl sulfoxide (DMSO) with polyvinyl alcohol (PVA) were chosen for the seeding purpose. The grain size distribution of nanodiamond particles in both seeding media was kept at the same level (approximately 1050 nm). After the seeding nanocrystalline diamond lms were deposited...
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Optical and structural properties of polycrystalline CVD diamond films grown on fused silica optical fibres pre-treated by high-power sonication seeding
PublikacjaIn this paper, the growth of polycrystalline chemical vapour deposition (CVD) diamond thin films on fused silica optical fibres has been investigated. The research results show that the effective substrate seeding process can lower defect nucleation, and it simultaneously increases surface encapsulation. However, the growth process on glass requires high seeding density. The effects of suspension type and ultrasonic power were...
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Improved surface coverage of an optical fibre with nanocrystalline diamond by the application of dip-coating seeding
PublikacjaGrowth processes of diamond thin films on the fused silica optical fibres (10 cm in length) were investigated at various temperatures. Fused silica pre-treatment by dip-coating in a dispersion consisting of detonation nanodiamond (DND) in dimethyl sulfoxide (DMSO) with polyvinyl alcohol (PVA) was applied. Nanocrystalline diamond (NCD) films were deposited on the fibres using the microwave plasma assisted chemical vapour deposition...
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Low temperature growth of diamond films on optical fibers using Linear Antenna CVD system
PublikacjaIt is not trivial to achieve a good quality diamond-coated fibre interface due to a large difference in the properties and composition of the diamond films (or use coating even) and the optical fibre material, i.e. fused silica. One of the biggest problems is the high temperature during the deposition which influences the optical fibre or optical fibre sensor structure (e.g. long-period gratings (LPG)). The greatest advantage of...
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Enhanced boron doping of thin diamond films grown in deuterium-rich microwave plasma
PublikacjaThe boron-doped diamond thin films were growth in deuterium rich microwave plasma in CVD process. The mechanism of influence of plasma composition on boron doping level was studied using optical emission spectroscopy. Deuterium rich plasma results in an increased dissociation of B2H6 precursor and intense boron-radicals' production. In consequence, a higher doping level of diamond films was observed by means of Laser Induced Breakdown...
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Optical properties of boron-doped nanocrystalline diamond films studied by spectroscopic ellipsometry
PublikacjaThe optical properties of boron-doped nanocrystalline diamond films, coated using Microwave Plasma Enhanced Chemical Vapour Deposition (μPE CVD) system, were analyzed by spectroscopic ellipsometry. Diamond films were deposited on silicon substrates. The ellipsometry data (refractive index (n(λ)), extinction coefficient (k(λ)) were modeled using dedicated software. Evolution of the optical structure with boron doping was observed...
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Investigation of H2:CH4 plasma composition by means of spatially resolved optical spectroscopy
PublikacjaThe system based on spatially resolved optical emission spectroscopy dedicated for in situ diagnostics of plasma assisted CVD processes is presented in this paper. Measurement system coupled with chemical vapour deposition chamber by dedicated fiber-optic paths enables investigation of spatial distribution of species densities (Hx, H+, CH, CH+) during chemical vapour deposition process. Experiments were performed for a various...
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Diamond-based protective layer for optical biosensors
PublikacjaOptical biosensors have become a powerful alternative to the conventional ways of measurement owing to their great properties, such as high sensitivity, high dynamic range, cost effectiveness and small size. Choice of an optical biosensor's materials is an important factor and impacts the quality of the obtained spectra. Examined biological objects are placed on a cover layer which may react with samples in a chemical, biological...
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Nitrogen-Doped Diamond Film for Optical Investigation of Hemoglobin Concentration
PublikacjaIn this work we present the fabrication and characterization of a diamond film which can be utilized in the construction of optical sensors for the investigation of biological samples. We produced a nitrogen-doped diamond (NDD) film using a microwave plasma enhanced chemical vapor deposition (MWPECVD) system. The NDD film was investigated with the use of scanning electron microscopy (SEM), atomic force microscopy (AFM) and Raman...
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Characterization of Optical and Electrical Properties of Transparent Conductive Boron-Doped Diamond thin Films Grown on Fused Silica
PublikacjaA conductive boron-doped diamond (BDD) grown on a fused silica/quartz has been investigated. Diamond thin films were deposited by the microwave plasma enhanced chemical vapor deposition (MW PECVD). The main parameters of the BDD synthesis, i.e. the methane admixture and the substrate temperature were investigated in detail. Preliminary studies of optical properties were performed to qualify an optimal CVD synthesis and film parameters...
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Tailoring the optical parameters of optical fiber interferometer with dedicated boron-doped nanocrystalline diamond thin film
PublikacjaOptical fiber interferometer using nanocrystalline boron-doped diamond film was investigated. The diamond films were deposited on glass plates using a Microwave Plasma-Enhanced Chemical Vapour Deposition (μPE CVD) sys-tem. The growth time was 3h, with boron doping level of 10 000 ppm producing films (B-NCD-10) of thickness ~ 200 nm. The presence of boron atoms in the diamond film is evident in Raman spectrum as peaks at 1212 cm-1...
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Linear antenna microwave chemical vapour deposition of diamond films on long-period fiber gratings for bio-sensing applications
PublikacjaThe growth processes of nanocrystalline diamond (NCD) thin films on fused silica optical fibers with UV-induced long-period gratings (LPGs) were investigated with regard to biosensing applications. The films were deposited using a linear antenna microwave plasma enhanced chemical vapor deposition system, which allows for the growth of diamond at temperatures below 350°C. The films exhibited a high refractive index n = 2.32, as...
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Direct amination of boron-doped diamond by plasma polymerized allylamine film
PublikacjaA novel microwave pulsed-plasma based method for the modification of the hydrogen-terminated polycrystalline boron-doped diamond (BDD) with a thin film of polymerized allylamine (PPAAm) is reported. A modified BDD surface is resistant to hydrolysis and delamination and is characterized by a high density of positively charged amino groups. Pulsed microwave plasma was applied to improve the degree of cross-linking and bonding of...
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Optical and electrical properties of ultrathin transparent nanocrystalline boron-doped diamond electrodes
PublikacjaThe optical properties of ultrathin (less than 100 nm) boron-doped nanocrystalline diamond (B-NCD) film were investigated in a wavelength range of 200 ÷ 20000 nm. The B-NCD refractive index showed values close to that of monocrystalline diamond (n = 2.45) in a broad wavelength range (450 ÷ 4000 nm). A transmittance up to 70% and the average film thickness of 70 nm were achieved. A special cone-shaped shim was used in the deposition...
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Distance measurement by the low coherent interferometer with NND layer (the source wavelegth 1310 nm)
Dane BadawczeThe obtained data was acquired by the interferometric fiber-optic sensor of distance. The setup was constructed of a broadband light source working at the central wavelength of 1310 nm, an optical spectrum analyzer, and a fiber-optic 2x1 coupler (with the power split 50:50). All elements were connected by standard single-mode optical fibers. The measurement...
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Distance measurement by the low coherent interferometer
Dane BadawczeThe obtained data was acquired by the interferometric fiber-optic sensor of distance. The setup was constructed of a broadband light source working at the central wavelength of 1560 nm, an optical spectrum analyzer and a fiber-optic 2x1 coupler (with the power split 50:50). All elements were connected by standard single-mode optical fibers. The measurement...
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Robert Bogdanowicz dr hab. inż.
OsobyRobert Bogdanowicz received his Ph.D. degree with honours in Electronics from the Gdansk University of Technology. He worked as a post-doc researcher in Ernst-Moritz-Arndt-Universität Greifswald Institut für Physik. He has initiated optical emission imaging of muti-magnetron pulsed plasma and contributed to the development of antibacterial implant coatings deposited by high-power impulse magnetron sputtering. He moved back to...
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Spatial characterization of H 2: CH 4 dissociation level in microwave ECR plasma source by fibre-optic OES
PublikacjaSpatially resolved optical emission spectroscopy (SR-OES) was used to investigate microwave activated H2/Ar/CH4 plasma under conditions of the electron cyclotron resonance (ECR). The chemistry and composition of the gas phase were studied using self-designed fibre-optic system with echelle type spectrometer during CVD deposition of polycrystalline diamond. One-dimensional intensity profiles of the main species were collected along...
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The electrical, morphological and optical properties of heavily boron-doped diamond sheets as a function of methane concentration in the gas phase
PublikacjaBoron-doped diamonds (BDD) are known for their excellent properties such as high thermal conductivity, high mobility, low absorption in visible light, and biocompatibility. In this work, we investigated the electrical, morphological and optical properties of heavily boron-doped diamond thin sheets as a function of methane concentration in the gas phase. Free-standing diamond sheets were fabricated using a microwave plasma-assisted...
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Application of thin diamond films in low-coherence fiber-optic Fabry Pérot displacement sensor
PublikacjaThe novel fiber-optic low coherence sensor with thin diamond films is demonstrated. The undoped and boron-doped diamond films were elaborated by the use of the microwave plasma enhanced chemical vapor deposition (μPE CVD) system. The optical signal from the Fabry–Pérot cavity made with the application of those thin films is sensitive to displacement. The sensor characterization was made in the range of 0–600 μm. The measurements...
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Nanocrystalline diamond microelectrode on fused silica optical fibers for electrochemical and optical sensing
PublikacjaFabrication process of thin boron-doped nanocrystalline diamond (B-NCD) microelectrode on fused silica single mode optical fiber has been investigated. The B-NCD films were deposited on the fibers using Microwave Plasma Assisted Chemical Vapor Deposition (MW PA CVD) at glass substrate temperature of 475 ºC. We have obtained homogenous, continuous and polycrystalline surface morphology with the mean grain size in the range of 100-250...
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Optoelectronic system for investigation of cvd diamond/DLC layers growth
PublikacjaDevelopment of the optoelectronic system for non-invasive monitoring of diamond/DLC (Diamond-Like-Carbon) thin films growth during μPA ECR CVD (Microwave Plasma Assisted Electron Cyclotron Resonance Chemical Vapour Deposition) process is described. The system uses multi-point Optical Emission Spectroscopy (OES) and long-working-distance Raman spectroscopy. Dissociation of H2 molecules, excitation and ionization of hydrogen atoms...
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In-situ monitoring of electropolymerization processes at boron-doped diamond electrodes by Mach-Zehnder interferometer
PublikacjaIn this work, the Mach-Zehnder interferometer was designed to monitor the electrochemical processes conducted at boron-doped diamond electrode surface. The diamond electrodes were synthesized via Microwave Plasma-Assisted Chemical Vapor Deposition on optical grade quartz glass. The achieved transmittance in working are of diamond electrodes reached 55 %. A cage system-based Mach-Zehnder interferometer was used which allowed the...
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The low coherence Fabry-Pérot interferometer with diamond and ZnO layers
PublikacjaThe authors present a fiber-optic Fabry-Pérot interferometer built with the application of diamond and zinc oxide (ZnO) thin layers. Thin ZnO films were deposited on the tip of a standard telecommunication single-mode optical fiber (SMF- 28) while the diamond layer was grown on the plate of silicon substrate. Investigated ZnO layers were fabricated by atomic layer deposition (ALD) and the diamond films were deposited using Microwave...
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RAMAN DIAGNOSTICS OF CVD DIAMOND GROWTH
PublikacjaDevelopment of Raman spectroscopic system for diagnostics of growth of diamond and BDD (Boron- Doped-Diamond) thin films during μPA CVD (Microwave Plasma Assisted Chemical Vapour Deposition) process is described. Raman studies of such films were carried out as in-situ monitoring of film deposition as ex-situ measurements conducted for a sample outside the reaction vessel after manufacturing process. Modular system for the in-situ...
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Optoelectronic system for monitoring of thin diamond layers growth
PublikacjaDevelopment of the optoelectronic system for monitoring of diamond/DLC (Diamond-Like-Carbon) thin films growth during mu PA ECR CVD (Microwave Plasma Assisted Electron Cyclotron Resonance Chemical Vapour Deposition) process is described. The multi-point Optical Emission Spectroscopy (OES) and Raman spectroscopy were employed as non-invasive optoelectronic tools. Dissociation of H-2 molecules, excitation and ionization of hydrogen...
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Application of boron-doped diamond film and ZnO layer in the Fabry-Pérot interferometer
PublikacjaIn this article there have been presented the use of boron-doped diamond films for sensor applications. The low-finesse Fabry-Pérot interferometer working in the reflective mode has been implemented. Two kinds of reflective layers have been elaborated: boron-doped diamond thin films and zinc-oxide (ZnO) layer. Thin ZnO layers were deposited by Atomic Layer Deposition (ALD) on the face of a standard telecommunication single-mode...
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Microscale diamond protection for a ZnO coated fiber optic sensor
PublikacjaFiber optic sensors are widely used in environmental, biological and chemical sensing. Due to the demanding environmental conditions in which they can be used, there is a risk of damaging the sensor measurement head placed in the measuring field. Sensors using nanolayers deposited upon the fiber structure are particularly vulnerable to damage. A thin film placed on the surface of the fiber end-face can be prone to mechanical damage...
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Electrical characterization of diamond/boron doped diamond nanostructures for use in harsh environment applications
PublikacjaThe polycrystalline boron doped diamond (BDD) shows stable electrical properties and high tolerance for harsh environments (e.g. high temperature or aggressive chemical compounds) comparing to other materials used in semiconductor devices. In this study authors have designed electronic devices fabricated from non-intentionally (NiD) films and highly boron doped diamond structures. Presented semiconductor devices consist of highly...
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Fabrication and characterization of boron-doped nanocrystalline diamond-coated MEMS probes
PublikacjaFabrication processes of thin boron-doped nanocrystalline diamond (B-NCD) films on silicon-based micro- and nano-electromechanical structures have been investigated. Nanocrystalline boron doped -diamond (B-NCD) films were deposited using Microwave Plasma Assisted Chemical Vapour Deposition (MW PA CVD) method. The variation of B-NCD morphology, structure and optical parameters were particularly investigated. The use of truncated...
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Application of BDD thin film electrode for electrochemical decomposition of heterogeneous aromatic compounds
PublikacjaThe aim of the presented study is to investigate the applicability of electrochemical oxidation of aromatic compounds containing heteroatoms, e.g. waste from production of pesticides or pharmaceutics, at a borondoped diamond (BDD) electrode. The BDD electrodes were synthesized by microwave plasma enhanced chemical vapour deposition (MW PE CVD). Investigation of the electrode surface by optical microscopy and scanning electron microscopy...
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MICROWAVE AND OPTICAL TECHNOLOGY LETTERS
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Opto-Electrochemical Sensing Device Based on Long-Period Grating Coated with Boron-Doped Diamond Thin Film
PublikacjaThe fabrication process of thin boron-doped nanocrystalline diamond (B-NCD) microelectrodes on fused silica single mode optical fiber cladding has been investigated. The B-NCD films were deposited on the fibers using Microwave Plasma Assisted Chemical Vapor Deposition (MW PA CVD) at glass substrate temperature of 475 ºC. We have obtained homogenous, continuous and polycrystalline surface morphology with high sp3 content in B-NCD...
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Novel Functionalization of Boron-Doped Diamond by Microwave Pulsed-Plasma Polymerized Allylamine Film
PublikacjaWe report the novel modification of a hydrogen-terminated polycrystalline boron-doped electrode with a microwave pulsed-plasma polymerized allylamine. Boron-doped diamond (BDD) was coated with a very thin layer of adherent cross-linked, pinhole- and additive-free allylamine plasma polymer (PPAAm) resistant to hydrolysis and delamination and characterized by a high density of positively charged amino groups. The pulsed microwave...
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Optical emission spectroscopy of plasma generated by a waveguide-supplied microwave plasma source operated at 915MHz
PublikacjaIn this paper we present the results of an optical emission spectroscopic study of an atmospheric pressure microwave (915 MHz) nitrogen and nitrogen with carbon dioxide (1%) plasma at high working gas flow rate. This study was aimed at determining rotational Trot and vibrational Tvib temperatures of N+2 ions and N2, CN molecules. The plasma was generated in a waveguide-supplied cavity-resonant type microwave plasma source. All...
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Optical Emission Spectroscopy of Microwave (915 MHz) Plasma in Atmospheric Pressure Nitrogen with Addition of Ethanol Vapour
PublikacjaIn this paper results of optical emission spectroscopic study of microwave 915 MHz plasma in atmospheric pressure nitrogen with an addition of ethanol vapour are presented. The plasma was generated in waveguide- -supplied cylinder-type nozzleless microwave plasma source. The aim of research was to determine the rotational Trot and vibrational Tvib temperatures of CN and C2. A method called bubbling was employed to introduce alcohol (ethanol)...
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Ellipsometric investigation of nitrogen doped diamond thin films grown in microwave CH4/H2/N2 plasma enhanced chemical vapor deposition
PublikacjaThe influence of N2 concentration (1%–8%) in CH4/H2/N2 plasma on structure and optical properties of nitrogen doped diamond (NDD) films was investigated. Thickness, roughness, and optical properties of the NDD films in the VIS–NIR range were investigated on the silicon substrates using spectroscopic ellipsometry. The samples exhibited relatively high refractive index (2.6 6 0.25 at 550 nm) and extinction coefficient (0.05 6 0.02...
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Physicochemical and Mechanical Performance of Freestanding Boron-Doped Diamond Nanosheets Coated with C:H:N:O Plasma Polymer
PublikacjaThe physicochemical and mechanical properties of thin and freestanding heavy boron-doped diamond (BDD) nanosheets coated with a thin C:H:N:O plasma polymer were studied. First, diamond nanosheets were grown and doped with boron on a Ta substrate using the microwave plasma-enhanced chemical vapor deposition technique (MPECVD). Next, the BDD/Ta samples were covered with nylon 6.6 to improve their stability in harsh environments and...
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Hydrogen production from ethanol In nitrogen microwave plasma At atmospheric pressure
PublikacjaHydrogen seems to be one of the most promising alternative energy sources. It is a renewable fuel as it could be produced from e.g. waste or bio-ethanol. Furthermore hydrogen is compatible with fuel cells and is environmentally clean. In contrast to conventional methods of hydrogen production such as water electrolysis or coal gasification we propose a method based on atmospheric pressure microwave plasma. In this paper we present...
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Application of atmospheric pressure microwave plasma source for hydrogen production from ethanol
PublikacjaIn contrast to conventional technologies of hydrogen production like water electrolysis or coal gasification we propose a method based on the atmospheric pressure microwave plasma. In this paper we present results of the experimental investigations of the hydrogen production from ethanol in the atmospheric pressure plasma generated in waveguidesupplied cylindrical type nozzleless microwave (915 MHz and 2.45 GHz) plasma source (MPS)....
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Spectroscopic study of atmospheric pressure 915 MHz microwave plasma at high argon flow rate
PublikacjaIn this paper results of optical emission spectroscopic (OES) study of atmospheric pressure microwave 915 MHz argon plasma are presented. The plasma was generated in microwave plasma source (MPS) cavity- resonant type. The aim of research was determination of electron excitation temperature Texc gas temperature Tg and electron number density ne. All experimental tests were performed with a gas flow rate of 100 and 200 l/min and...
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In-situ optical diagnostics of boron-doped diamond films growth
PublikacjaInterferometry is a desirable method for in-situ measurement of thin, dielectric film growth, as it don't modify conditions of film deposition. Here we present interferometrical measurements of thickness of doped diamond films during Chemical Vapor Deposition (CVD) process. For this purpose we used a semiconductor laser with a 405nm wavelength. Additional ex-situ measurement using spectral interferometry and ellipsometry...
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Exotic Optical Fibres
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Special Optical Fibres
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Plasma-Based Deposition and Processing Techniques for Optical Fiber Sensing
PublikacjaPlasma-based techniques are widely applied for well-controlled deposition, etching or surface functionalization of a number of materials. It is difficult to imagine fabrication of novel microelectronic and optoelectronic devices without using plasma-enhanced deposition of thin films, their selective etching or functionalization of their surfaces for subsequent selective binding of chemical or biological molecules. Depending on...
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Incorporation of nitrogen in diamond films – A new way of tuning parameters for optical passive elements
PublikacjaThis paper investigates the impact of nitrogen incorporation in diamond films for the construction of an interferometric sensor to measure displacement. Diamond films with different nitrogen levels (0–5%) were deposited on silicon substrates by microwave plasma enhanced chemical vapor deposition. The structural characteristics of these samples are characterized using scanning electron microscopy (SEM), atomic force microscopy (AFM), confocal...
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Enhanced electrochemical kinetics of highly-oriented (111)-textured boron-doped diamond electrodes induced by deuterium plasma chemistry
PublikacjaNovel highly-oriented (111)-textured boron-doped diamond electrodes (BDDD) featuring high electrochemical activity and electrode stability toward electrochemical analytics were fabricated by deuterium-rich microwave plasma CVD. The high flux deuterium plasma-induced preferential formation of (111)-faceted diamond as revealed by XRD. The highly-oriented diamond surface exhibited improved boron dopant incorporation and activation,...
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Incorporation of nitrogen in diamond films - A new way of tuning parameters for optical passive elements
PublikacjaThis paper investigates the impact of nitrogen incorporation in diamond films for the construction of an interferometric sensor to measure displacement. Diamond films with different nitrogen levels (0–5%) were deposited on silicon substrates by microwave plasma enhanced chemical vapor deposition. The structural characteristics of these samples are characterized using scanning electron microscopy (SEM), atomic force microscopy...
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Microcrystalline diamond film evaluation by spectroscopic optical coherence tomography
PublikacjaThis study has focused on the microcrystalline diamond film (MCD) thickness evaluation. For this purpose, optical coherence tomography (OCT) enhanced by spectroscopic analysis has been used as a method of choice. The average thickness of the tested layer was about 1.5 µm, which is below the standard 2-point OCT resolution. In this case, the usefulness of the spectroscopic analysis was confirmed for the evaluation of the thickness...