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Wyniki wyszukiwania dla: microwave plasma chemical vapour deposition
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Linear antenna microwave chemical vapour deposition of diamond films on long-period fiber gratings for bio-sensing applications
PublikacjaThe growth processes of nanocrystalline diamond (NCD) thin films on fused silica optical fibers with UV-induced long-period gratings (LPGs) were investigated with regard to biosensing applications. The films were deposited using a linear antenna microwave plasma enhanced chemical vapor deposition system, which allows for the growth of diamond at temperatures below 350°C. The films exhibited a high refractive index n = 2.32, as...
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Ellipsometric investigation of nitrogen doped diamond thin films grown in microwave CH4/H2/N2 plasma enhanced chemical vapor deposition
PublikacjaThe influence of N2 concentration (1%–8%) in CH4/H2/N2 plasma on structure and optical properties of nitrogen doped diamond (NDD) films was investigated. Thickness, roughness, and optical properties of the NDD films in the VIS–NIR range were investigated on the silicon substrates using spectroscopic ellipsometry. The samples exhibited relatively high refractive index (2.6 6 0.25 at 550 nm) and extinction coefficient (0.05 6 0.02...
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Investigation of H2:CH4 plasma composition by means of spatially resolved optical spectroscopy
PublikacjaThe system based on spatially resolved optical emission spectroscopy dedicated for in situ diagnostics of plasma assisted CVD processes is presented in this paper. Measurement system coupled with chemical vapour deposition chamber by dedicated fiber-optic paths enables investigation of spatial distribution of species densities (Hx, H+, CH, CH+) during chemical vapour deposition process. Experiments were performed for a various...
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From ashes to porous hierarchical nanocarbon electrode: Upcycling secondary waste materials through self-catalytic chemical vapour deposition
PublikacjaMetal and metal oxide particles are abundant in various ash-based wastes. Utilizing these as catalyst sources for the fabrication of carbon nanomaterials could present a valuable approach to reduce our reliance on non-renewable and costly catalyst sources, thereby facilitating large-scale nanomaterial production. In this context, secondary waste materials (SWMs) are by-products resulting from the (complete or partial) combustion...
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Optimization of Polycrystalline CVD Diamond Seeding with the Use of sp³/sp² Raman Band Ratio
PublikacjaThe influence of various nanodiamond colloids used for seeding nondiamond substrates in microwave plasma enhanced chemical vapour deposition diamond process was investigated. Colloids based on deionized water, isopropanol alcohol and dimethyl sulfoxide (DMSO) were used with different grain size dispersion: 150, 400 and 35 nm, respectively. The influence of growth time was also taken into consideration and bias enhanced nucleation....
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Long-working-distance Raman system for monitoring of uPA ECR CVD process of thin diamond/DLC layers growth
PublikacjaW artykule przedstawiono konstrucję systemu optoelektronicznego do monitoringu ramanowskiego in-situ procesu μPA ECR CVD (ang.: Microwave Plasma Assisted Electron Cyclotron Resonance Chemical Vapour Deposition), stosowanego do osadzania cienkich warstw diamentowych i diamentopodobnych DLC. System ma budowę modułową i wyposażony jest w dedykowane sondy optyczne. Przedstawiono wyniki pomiarów testowych, potwierdzjące, że system posiada...
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Optical properties of boron-doped nanocrystalline diamond films studied by spectroscopic ellipsometry
PublikacjaThe optical properties of boron-doped nanocrystalline diamond films, coated using Microwave Plasma Enhanced Chemical Vapour Deposition (μPE CVD) system, were analyzed by spectroscopic ellipsometry. Diamond films were deposited on silicon substrates. The ellipsometry data (refractive index (n(λ)), extinction coefficient (k(λ)) were modeled using dedicated software. Evolution of the optical structure with boron doping was observed...
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Boron-Doped Diamond/GaN Heterojunction—The Influence of the Low-Temperature Deposition
PublikacjaWe report a method of growing a boron-doped diamond film by plasma-assisted chemical vapour deposition utilizing a pre-treatment of GaN substrate to give a high density of nucleation. CVD diamond was deposited on GaN substrate grown epitaxially via the molecular-beam epitaxy process. To obtain a continuous diamond film with the presence of well-developed grains, the GaN substrates are exposed to hydrogen plasma prior to deposition....
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Haemocompatibility Of Non-Functionalized And Plasmachemical Functionalized Detonation Nanodiamond Particles
PublikacjaThe purpose of this paper is to present the innovative design of microwave plasma system for modification of detonation nanodiamond particles (DNP) using a special rotating drum placed inside the reactor. Nanodiamond particles manufactured by detonation method reveal the biological activity depending on surface functionalization. Plasmachemical modification of detonation nanodiamond particles gives the possibility of controlling...
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Optoelectronic system for investigation of cvd diamond/DLC layers growth
PublikacjaDevelopment of the optoelectronic system for non-invasive monitoring of diamond/DLC (Diamond-Like-Carbon) thin films growth during μPA ECR CVD (Microwave Plasma Assisted Electron Cyclotron Resonance Chemical Vapour Deposition) process is described. The system uses multi-point Optical Emission Spectroscopy (OES) and long-working-distance Raman spectroscopy. Dissociation of H2 molecules, excitation and ionization of hydrogen atoms...
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RAMAN DIAGNOSTICS OF CVD DIAMOND GROWTH
PublikacjaDevelopment of Raman spectroscopic system for diagnostics of growth of diamond and BDD (Boron- Doped-Diamond) thin films during μPA CVD (Microwave Plasma Assisted Chemical Vapour Deposition) process is described. Raman studies of such films were carried out as in-situ monitoring of film deposition as ex-situ measurements conducted for a sample outside the reaction vessel after manufacturing process. Modular system for the in-situ...
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Optical and electrical properties of ultrathin transparent nanocrystalline boron-doped diamond electrodes
PublikacjaThe optical properties of ultrathin (less than 100 nm) boron-doped nanocrystalline diamond (B-NCD) film were investigated in a wavelength range of 200 ÷ 20000 nm. The B-NCD refractive index showed values close to that of monocrystalline diamond (n = 2.45) in a broad wavelength range (450 ÷ 4000 nm). A transmittance up to 70% and the average film thickness of 70 nm were achieved. A special cone-shaped shim was used in the deposition...
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Nanocrystalline CVD Diamond Coatings on Fused Silica Optical Fibres: Optical Properties Study
Publikacjapre-treatment by dip coating in two detonation nanodiamond (DND) seeding media has been studied. The DND suspension in ethyl alcohol and dispersion of DND in dimethyl sulfoxide (DMSO) with polyvinyl alcohol (PVA) were chosen for the seeding purpose. The grain size distribution of nanodiamond particles in both seeding media was kept at the same level (approximately 1050 nm). After the seeding nanocrystalline diamond lms were deposited...
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Optical and structural properties of polycrystalline CVD diamond films grown on fused silica optical fibres pre-treated by high-power sonication seeding
PublikacjaIn this paper, the growth of polycrystalline chemical vapour deposition (CVD) diamond thin films on fused silica optical fibres has been investigated. The research results show that the effective substrate seeding process can lower defect nucleation, and it simultaneously increases surface encapsulation. However, the growth process on glass requires high seeding density. The effects of suspension type and ultrasonic power were...
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Application of boron-doped diamond film and ZnO layer in the Fabry-Pérot interferometer
PublikacjaIn this article there have been presented the use of boron-doped diamond films for sensor applications. The low-finesse Fabry-Pérot interferometer working in the reflective mode has been implemented. Two kinds of reflective layers have been elaborated: boron-doped diamond thin films and zinc-oxide (ZnO) layer. Thin ZnO layers were deposited by Atomic Layer Deposition (ALD) on the face of a standard telecommunication single-mode...
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The use of thin diamond films in fiber optic low-coherence interferometers”
PublikacjaIn this paper we present the use of thin diamond films in fiber-optic low-coherence interferometers. Two kinds of diamond surfaces were used: undoped diamond film and boron-doped diamond film. They were deposited on glass plates as well as silicon layers. A conventionally used mirror was used as a reference layer. Diamond films were deposited using Microwave Plasma Enhanced Chemical Vapour Deposition (μPE CVD) system. Measurements...
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Amperometric sensing of chemical oxygen demand at glassy carbon and silicon electrodes modified with boron-doped diamond
Publikacja.A boron-doped diamond (BDD) sensor is proposed for effective detection of chemical oxygen demand (COD) by means of amperometric technique. Boron-doped diamond thin films, acting as active sensors, were deposited on both silicon wafer and glassy carbon (GC) substrates by microwave plasma assisted chemical vapour deposition. SEM micrographs showed that BDD–Si displays triangle-faceted crystallites ca. 0.5–3 μm in size, while BDD–GC...
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Optical Emission Spectroscopy of Microwave (915 MHz) Plasma in Atmospheric Pressure Nitrogen with Addition of Ethanol Vapour
PublikacjaIn this paper results of optical emission spectroscopic study of microwave 915 MHz plasma in atmospheric pressure nitrogen with an addition of ethanol vapour are presented. The plasma was generated in waveguide- -supplied cylinder-type nozzleless microwave plasma source. The aim of research was to determine the rotational Trot and vibrational Tvib temperatures of CN and C2. A method called bubbling was employed to introduce alcohol (ethanol)...
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Application of BDD thin film electrode for electrochemical decomposition of heterogeneous aromatic compounds
PublikacjaThe aim of the presented study is to investigate the applicability of electrochemical oxidation of aromatic compounds containing heteroatoms, e.g. waste from production of pesticides or pharmaceutics, at a borondoped diamond (BDD) electrode. The BDD electrodes were synthesized by microwave plasma enhanced chemical vapour deposition (MW PE CVD). Investigation of the electrode surface by optical microscopy and scanning electron microscopy...
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Electrical characterization of diamond/boron doped diamond nanostructures for use in harsh environment applications
PublikacjaThe polycrystalline boron doped diamond (BDD) shows stable electrical properties and high tolerance for harsh environments (e.g. high temperature or aggressive chemical compounds) comparing to other materials used in semiconductor devices. In this study authors have designed electronic devices fabricated from non-intentionally (NiD) films and highly boron doped diamond structures. Presented semiconductor devices consist of highly...
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Optoelectronic system for monitoring of thin diamond layers growth
PublikacjaDevelopment of the optoelectronic system for monitoring of diamond/DLC (Diamond-Like-Carbon) thin films growth during mu PA ECR CVD (Microwave Plasma Assisted Electron Cyclotron Resonance Chemical Vapour Deposition) process is described. The multi-point Optical Emission Spectroscopy (OES) and Raman spectroscopy were employed as non-invasive optoelectronic tools. Dissociation of H-2 molecules, excitation and ionization of hydrogen...
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Improved surface coverage of an optical fibre with nanocrystalline diamond by the application of dip-coating seeding
PublikacjaGrowth processes of diamond thin films on the fused silica optical fibres (10 cm in length) were investigated at various temperatures. Fused silica pre-treatment by dip-coating in a dispersion consisting of detonation nanodiamond (DND) in dimethyl sulfoxide (DMSO) with polyvinyl alcohol (PVA) was applied. Nanocrystalline diamond (NCD) films were deposited on the fibres using the microwave plasma assisted chemical vapour deposition...
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Nucleation and growth of CVD diamond on fused silica optical fibres with titanium dioxide interlayer
PublikacjaNucleation and growth processes of thin diamond films on fused silica optical fibres have been investigated. Fibres were coated with diamond film using microwave plasma enhanced chemical vapour deposition (µPE CVD) system. Since the growth of diamond on the fused silica glass requires high seeding density, two types of glass pre-treatment were applied: titanium dioxide (TiO2) interlayer deposition and sonication in nanodiamond...
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Tailoring the optical parameters of optical fiber interferometer with dedicated boron-doped nanocrystalline diamond thin film
PublikacjaOptical fiber interferometer using nanocrystalline boron-doped diamond film was investigated. The diamond films were deposited on glass plates using a Microwave Plasma-Enhanced Chemical Vapour Deposition (μPE CVD) sys-tem. The growth time was 3h, with boron doping level of 10 000 ppm producing films (B-NCD-10) of thickness ~ 200 nm. The presence of boron atoms in the diamond film is evident in Raman spectrum as peaks at 1212 cm-1...
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Fabrication and characterization of boron-doped nanocrystalline diamond-coated MEMS probes
PublikacjaFabrication processes of thin boron-doped nanocrystalline diamond (B-NCD) films on silicon-based micro- and nano-electromechanical structures have been investigated. Nanocrystalline boron doped -diamond (B-NCD) films were deposited using Microwave Plasma Assisted Chemical Vapour Deposition (MW PA CVD) method. The variation of B-NCD morphology, structure and optical parameters were particularly investigated. The use of truncated...
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Ocena możliwości zastosowania obróbki laserowej i implantacji jonowej stopów metali na implant stawu kolanowego
PublikacjaZagadnieniem podjętym w niniejszym referacie jest zmodyfikowanie warstwy wierzchniej stopu tytanu Ti6Al4V przeznaczonego na implanty. Autor opisuje metody modyfikacji powierzchni w wyniki nakładania warstwy węglowej metodą PA CVD (ang. Plasma Assisted Chemical Vapour Deposition) oraz warstwy hydroksyapatytu metodą zol-żel i elektrochemiczną. Badania zostały przeprowadzone w laboratoriach Zakładu Biomateriałów, Katedry Inżynierii...
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Anomalous anisotropy of deuterium-grown boron-doped diamond and the role of boron-tetramers in the Mott-Insulator transition
Dane BadawczeWe show anisotropy in the superconductivity for boron-doped diamond thin films prepared with Microwave Plasma Assisted Chemical Vapor Deposition using deuterium-rich plasma. This anomalous phase transition is linked with the emergence of boson quantum entanglement states behaving as a bosonic insulating state. Here, we show that the superconducting...
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Distance measurement by the low coherent interferometer
Dane BadawczeThe obtained data was acquired by the interferometric fiber-optic sensor of distance. The setup was constructed of a broadband light source working at the central wavelength of 1560 nm, an optical spectrum analyzer and a fiber-optic 2x1 coupler (with the power split 50:50). All elements were connected by standard single-mode optical fibers. The measurement...
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Distance measurement by the low coherent interferometer with NND layer (the source wavelegth 1310 nm)
Dane BadawczeThe obtained data was acquired by the interferometric fiber-optic sensor of distance. The setup was constructed of a broadband light source working at the central wavelength of 1310 nm, an optical spectrum analyzer, and a fiber-optic 2x1 coupler (with the power split 50:50). All elements were connected by standard single-mode optical fibers. The measurement...
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Microscale diamond protection for a ZnO coated fiber optic sensor
PublikacjaFiber optic sensors are widely used in environmental, biological and chemical sensing. Due to the demanding environmental conditions in which they can be used, there is a risk of damaging the sensor measurement head placed in the measuring field. Sensors using nanolayers deposited upon the fiber structure are particularly vulnerable to damage. A thin film placed on the surface of the fiber end-face can be prone to mechanical damage...
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Nitrogen-doped diamond thin films: potential application in Fabry-Pérot interferometer
PublikacjaIn this paper we present results of preliminary research of using nitrogen-doped diamond (NDD) films as reflective layer in Fabry-Pérot interferometer. NDD films were deposited on Si substrates by Microwave Plasma Enhanced Chemical Vapor Deposition (MPECVD) with the use of CH4, H2 and N2 gas mixtures. During deposition process methane flow rate varied while nitrogen flow was constant. We performed series of measurements which showed...
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Raman data of deuterium and hydrogen grown boron-doped diamond
Dane BadawczeRaman spectra were recorded at room temperature using a micro-Raman spectrometer (Invia, Renishaw) equipped with an edge filter with different excitation wavelengths and lasers: UV λ = 325 nm (HeCd), blue λ = 488 nm (Ar+), green λ = 514 nm (Ar+), and IR λ = 785 nm (IR diode) and 50× microscope objective. To avoid sample heating, the radiation power...
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Spatial characterization of H 2: CH 4 dissociation level in microwave ECR plasma source by fibre-optic OES
PublikacjaSpatially resolved optical emission spectroscopy (SR-OES) was used to investigate microwave activated H2/Ar/CH4 plasma under conditions of the electron cyclotron resonance (ECR). The chemistry and composition of the gas phase were studied using self-designed fibre-optic system with echelle type spectrometer during CVD deposition of polycrystalline diamond. One-dimensional intensity profiles of the main species were collected along...
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Determination of chemical oxygen demand (cod) at boron-doped diamond (bdd) sensor by means of amperometric technique
PublikacjaA boron-doped diamond (BDD) sensor was proposed for effective detection of chemical oxygen demand (COD) by means of amperometric technique. Thin boron doped diamond active sensor layer was deposited on Si wafer and glassy carbon substrate by Microwave Plasma Enhanced Chemical Vapor Deposition (MW PE CVD). The structure of BDD was confirmed by Raman spectra analysis. Broad Raman bands centered at 482 cm-1 and 1219 cm-1 are typical...
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Determination of Chemical Oxygen Demand (COD) at Boron-doped Diamond (BDD) Sensor by Means of Amperometric Technique
PublikacjaA boron-doped diamond (BDD) sensor was proposed for effective detection of chemical oxygen demand (COD) by means of amperometric technique. Thin boron doped diamond active sensor layer was deposited on Si wafer and glassy carbon substrate by Microwave Plasma Enhanced Chemical Vapor Deposition (MW PE CVD). The structure of BDD was confirmed by Raman spectra analysis. Broad Raman bands centered at 482 cm-1 and 1219 cm-1 are typical...
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Al-DIAMOND SCHOTTKY TUNNEL DIODES WITH BARRIER HEIGHT CONTROL
PublikacjaFew-nanometer-thick very highly boron-doped p-type layers were fabricated at metal-semiconductor interfaces of Schottky barrier diodes formed with aluminum on polycrystalline diamond. Preliminary results show that hermionically-assisted tunneling mechanism results in lower voltage drops at forward biasing of these diodes than expected for the Al-diamond metal-semiconductor potential barrier B. The effective barrier height Bpeff...
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Fabrication and characterization of composite TiO2 nanotubes/ boron-doped diamond electrodes towards enhanced supercapacitors
PublikacjaThe composite TiO2 nanotubes / boron-doped diamond electrodes were deposited using Microwave Plasma Enhanced Chemical Vapor Deposition resulting in the improved electrochemical performance. This composite electrode can deliver high specific capacitance of 7.46 mF cm‐− 2 comparing to boron-doped diamond (BDD) deposited onto flat Ti plate (0.11 mF cm‐− 2).The morphology and composition of composite electrode were characterized...
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The low coherence Fabry-Pérot interferometer with diamond and ZnO layers
PublikacjaThe authors present a fiber-optic Fabry-Pérot interferometer built with the application of diamond and zinc oxide (ZnO) thin layers. Thin ZnO films were deposited on the tip of a standard telecommunication single-mode optical fiber (SMF- 28) while the diamond layer was grown on the plate of silicon substrate. Investigated ZnO layers were fabricated by atomic layer deposition (ALD) and the diamond films were deposited using Microwave...
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Nanocrystalline diamond sheets as protective coatings for fiber-optic measurement head
PublikacjaFiber-optic sensors find numerous applications in science and industry, but their full potential is limited because of the risk of damaging the measurement head, in particular, due to the vulnerability of unprotected tips of the fiber to mechanical damage and aggressive chemical agents. In this paper, we report the first use of a new nanocrystalline diamond structure in a fiber-optic measurement head as a protective coating of...
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XPS data of deuterium and hydrogen grown boron-doped diamond
Dane BadawczeThe high-resolution C1s X-ray absorption spectra of BDD@H and BDD@D samples were measured using the facilities of the HE-SGM beamline (HE-SGM) at the BESSY II synchrotron radiation source of Helmholtz–Zentrum Berlin (HZB).[90] The measurements were carried out under ultra-high vacuum conditions: P ≈ 2×10−9 Torr at T = 300 K. The NEXAFS spectra were...
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Seeding enhancement for microcrystaline diamond layers growth on non-diamond substrates
PublikacjaThe present paper gives an overview on the possible methods of seeding substrates for diamond layers growth. Diamond in reason of his properties is very desirable material in microelectronic, biomedical and waste treatment sensors. Microcrystalline diamond for these applications must be grown on silicon substrate in microwave plasma assisted chemical vapor deposition (MPACVD). To grow diamond on non-diamond surface pre-growth...
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Nitrogen-Doped Diamond Film for Optical Investigation of Hemoglobin Concentration
PublikacjaIn this work we present the fabrication and characterization of a diamond film which can be utilized in the construction of optical sensors for the investigation of biological samples. We produced a nitrogen-doped diamond (NDD) film using a microwave plasma enhanced chemical vapor deposition (MWPECVD) system. The NDD film was investigated with the use of scanning electron microscopy (SEM), atomic force microscopy (AFM) and Raman...
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Doped Nanocrystalline Diamond Films as Reflective Layers for Fiber-Optic Sensors of Refractive Index of Liquids
PublikacjaThis paper reports the application of doped nanocrystalline diamond (NCD) films—nitrogen-doped NCD and boron-doped NCD—as reflective surfaces in an interferometric sensor of refractive index dedicated to the measurements of liquids. The sensor is constructed as a Fabry–Pérot interferometer, working in the reflective mode. The diamond films were deposited on silicon substrates by a microwave plasma enhanced chemical vapor deposition...
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Application of thin diamond films in low-coherence fiber-optic Fabry Pérot displacement sensor
PublikacjaThe novel fiber-optic low coherence sensor with thin diamond films is demonstrated. The undoped and boron-doped diamond films were elaborated by the use of the microwave plasma enhanced chemical vapor deposition (μPE CVD) system. The optical signal from the Fabry–Pérot cavity made with the application of those thin films is sensitive to displacement. The sensor characterization was made in the range of 0–600 μm. The measurements...
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Diamond Structures for Tuning of the Finesse Coefficient of Photonic Devices
PublikacjaFinesse coefficient is one of the most important parameters describing the properties of a resonant cavity. In this research, a mathematical investigation of the application of diamond structures in a fiber-optic Fabry–Perot measurement head to assess their impact on the finesse coefficient is proposed. We present modeled transmission functions of cavities utilizing a nitrogen-doped diamond, a boron-doped diamond, nanocrystalline...
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A novel hierarchically-porous diamondized polyacrylonitrile sponge-like electrodes for acetaminophen electrochemical detection
PublikacjaA novel composite electrode material consisting of tangled fibrous polyacrylonitrile-based hierarchically-struc- tured nanocomposites has been produced by wet-spinning, carbonized and decorated with a carbon nano- architecture by microwave plasma-enhanced chemical vapor deposition and investigated as a metal-free electrode for the enhanced electrochemical detection of acetaminophen. Surprisingly, the hierarchical fiber ar- chitecture...
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Charge-based deep level transient spectroscopy of B-doped and undoped polycrystalline diamond films
PublikacjaThe undoped and B-doped polycrystalline diamond thin film was synthesized by hot filament chemical vapor deposition and microwave plasma, respectively. The structural characterization was performed by scanning electron microscopy, X-ray diffraction and Raman spectroscopy. The electrical properties of synthesized diamond layer were characterized by dc-conductivity method and charge deep level transient spectroscopy. The B-doped...
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Carbon nanowalls: A new versatile graphene based interface for laser desorption/ionization-mass spectrometry detection of small compounds in real samples.
PublikacjaCarbon nanowalls, vertically aligned graphene nanosheets, attract attention owing to their tunable band-gap, high conductivity, high mechanical robustness, high optical absorbance and other remarkable properties. In this paper, we report for the first time, the use of hydrophobic boron-doped carbon nanowalls (CNWs) for laser desorption/ionization of small compounds and their subsequent detection by mass spectrometry (LDI-MS). The...
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Physicochemical and Mechanical Performance of Freestanding Boron-Doped Diamond Nanosheets Coated with C:H:N:O Plasma Polymer
PublikacjaThe physicochemical and mechanical properties of thin and freestanding heavy boron-doped diamond (BDD) nanosheets coated with a thin C:H:N:O plasma polymer were studied. First, diamond nanosheets were grown and doped with boron on a Ta substrate using the microwave plasma-enhanced chemical vapor deposition technique (MPECVD). Next, the BDD/Ta samples were covered with nylon 6.6 to improve their stability in harsh environments and...
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Electrochemical performance of thin free-standing boron-doped diamond nanosheet electrodes
PublikacjaIn the following work we describe preparation and the electrochemical performance of thin and free-standing heavy boron-doped diamond (BDD) nanosheets. The investigated foils were deposited on Ta substrate using microwave plasma-enhanced chemical vapor deposition technique (MPECVD). Foils of two B-dopant densities were investigated, obtained on the base of 10 k and 20 k ppm [B]/[C] ratio in the gas admixture. The obtained foils...