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Search results for: MAGNETRON SPUTTERING
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Fabrication of Antibacterial Metal Surfaces Using Magnetron-Sputtering Method
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Ellipsometric study of carbon nitride films deposited by DC-magnetron sputtering
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The Influence of Magnetron Sputtering Process Temperature on ZnO Thin-Film Properties
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Ellipsometric study of carbon nitride films deposited by DC-magnetron sputtering
PublicationWe report the optical properties of a carbon nitride (CNx) film as a function of nitrogen concentration (N/C) of the deposited film. As nitrogen concentration is increased (N/C ratio) in a CNx film, the refractive index and band gap also increase. The real and imaginary parts, n and k (refractive index and extinction coefficient) of the complex refraction index of carbon nitride films were determined by spectroscopic ellipsometry...
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Optical and chemical characterization of thin TiNx films deposited by DC-magnetron sputtering
PublicationThin titanium nitride (tinx) films were deposited on silicon substrates by means of a reactive dc-magnetron plasma. Layers were synthesized under various conditions of discharge power and nitrogen flows in two operation modes of the magnetron (the so-called "balanced" and "unbalanced" modes). The optical constants of the tinx films were investigated by spectroscopic ellipsometry (se). X-ray photoelectron spectroscopy (xps) was...
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Deposition of thin titanium–copper films with antimicrobial effect by advanced magnetron sputtering methods
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Effect of mid-frequency discharge assistance on dual-high power impulse magnetron sputtering
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Dynamic Study of Dual High-Power Impulse Magnetron Sputtering Discharge by Optical Emission Imaging
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Effect of nitrogen doping on TiOxNythin film formation at reactive high-power pulsed magnetron sputtering
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Growth and properties of Ti-Cu films with respect to plasma parameters in dual-magnetron sputtering discharges
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Effect of nitrogen doping on TiOxNy thin film formation at reactive high-power pulsed magnetron sputtering
PublicationThe paper is focused on a study of formation of TiOxNy thin films prepared by pulsed magnetron sputtering of metallic Ti target. Oxygen and nitrogen were delivered into the discharge in the form of reactive gases O2 and N2. The films were deposited by high-power impulse magnetron sputtering working with discharge repetition frequency f = 250 Hz at low (p = 0.75 Pa) and high (p = 10 Pa) pressure. The substrates were on floating...
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Thermal and mechanical properties of (W,Zr)B2-z coatings deposited by RF magnetron sputtering method
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Structure and optical parameters of Eu doped tellurium oxide thin films prepared by reactive magnetron sputtering method
PublicationIn this work the structural properties and photoluminescence of tellurium dioxide thin films doped by europium were described. Thin films were deposited by magnetron sputtering method and simultaneously heated at 200 °C. Presence of Eu ions and their valence states was confirmed by X-ray photoemission spectroscopy measurements. The structure of the films as well as the influence of europium dopant on crystalline structure of the...
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Influence of reactive oxygen species during deposition of iron oxide films by high power impulse magnetron sputtering.
PublicationIron oxide films were deposited using high power impulse magnetron sputtering (HiPIMS) of an iron cathode in an argon/oxygen gas mixture at different gas pressures (0.5~Pa, 1.5~Pa, and 5.0~Pa). The HiPIMS system was operated at a repetition frequency $f = 100$~Hz with a duty cycle of 1~\%. A main goal is a comparison of film growth during conventional and electron cyclotron wave resonance-assisted HiPIMS. The deposition plasma...
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Study of antistatic properties of TiO2:Tb and TiO2:(Tb,Pd) thin films obtained by magnetron sputtering process
PublicationPraca zawiera opis metody pomiaru właściwości antystatycznych cienkich warstw wraz ze zdefiniowaniem kryteriów antystatyczności powierzchni. przedstawiono wyniki pomiarów czasów rozładowywania się warstw tlenkowych. materiały wytworzono metodą rozpylania magnetronowego.
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Physical properties of homogeneous TiO2films prepared by high power impulse magnetron sputtering as a function of crystallographic phase and nanostructure
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Mechanical and Thermal Properties of W-Ta-B Coatings Deposited by High-Power Impulse Magnetron Sputtering (HiPIMS)
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Physical properties of homogeneous TiO2 films prepared by high power impulse magnetron sputtering as a function of crystallographic phase and nanostructure
PublicationOptical, photo-electrochemical, crystallographic and morphological properties of TiO2 thin films prepared by high power impulse magnetron sputtering at low substrate temperatures (<65 ◦C) without post-deposition thermal annealing are studied. The film composition-anatase, rutile or amorphous TiO2-is adjusted by the pressure (p ∼ 0.75-15 Pa) in the deposition chamber. The different crystallographic phases were determined with grazing...
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Study of structural and optical properties of tio2:tb thin films prepared by high energy reactive magnetron sputtering method
Publicationw pracy zaprezentowano wyniki badań optycznych i strukturalnych cienkich warstw na bazie domieszkowanego tlenku tytanu. warstwy tlenkowe wytworzono zmodyfikowaną metodą rozpylania magnetronowego z targetu mozaikowego w atmosferze tlenu. badania strukturalne wykazały nanokrystaliczność badanych warstw.
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Plasma diagnostics of low pressure high power impulse magnetron sputtering assisted by electron cyclotron wave resonance plasma
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Highly Oriented Zirconium Nitride and Oxynitride Coatings Deposited via High‐Power Impulse Magnetron Sputtering: Crystal‐Facet‐Driven Corrosion Behavior in Domestic Wastewater
PublicationHerein, highly crystalline ZrxNy and ZrxNyOz coatings are achieved by the deposition via high‐power impulse magnetron sputtering. Various N2 and N2/O2 gas mixtures with argon are investigated. The chemical composition and, as a result, mechanical properties of the deposited layer can be tailored along with morphological and crystallographic structural changes. The corrosion resistance behavior is studied by potentiodynamic measurements...
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Towards high quality ITO coatings: the impact of nitrogen admixture in HiPIMS discharges
PublicationThe paper reports controlled deposition of optically transparent and electrically conductive ITO films prepared by a combination of rf (13.56 MHz) and High Power Impulse Magnetron Sputtering (HiPIMS) systems without any post deposition thermal treatment/annealing. It is shown that (i) reactive admixture of N2 gas to the process and (ii) pressure in the deposition chamber enable to optimize optical properties of ITO films. Furthermore,...
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Influence of titanium layer on counter electrode on electrical parameters of DSSC
PublicationIn this paper the influence of the Ti layer thickness at counter-electrode on electrical parameters of DSSCs was examined. The transparent conductive oxide – less (TCO-less) counter electrodes (CE) with titanium layers and platinum as catalyst on Bk7 glass were prepared. Thin metallic films were deposited by means of magnetron sputtering (titanium) and Pulsed Laser Deposition (platinum). The counter electrode with Pt layer on Fluorine...
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A Multi Rig Screening Test for Thin Ceramic Coatings in Bio - Tribological Applications
PublicationA method is presented for the comparative testing of wear resistance of ceramic coatings made from materials potentially feasible in tribo - medical applications, mainly orthopaedic implants made from ceramics coated metals for low cost, long life and low wear particle emission into the body. The method was devised as the main tool for use in research and is comprised of flat on flat and ball on flat surface (sliding) tests. Seven...
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Degradation mechanisms and protective coatings for ferritic stainless-steel interconnects of solid oxide fuel cells: A review
PublicationFerritic stainless steels (FSSs) are promising interconnect materials for solid oxide fuel cells (SOFCs). However, FSSs undergo fast thermal-oxidation during SOFC operation, generating poorly-conductive oxide scales and volatile chromium-oxides detrimental to cathodes. Developing protective coatings is crucial for inhibiting degradation of FSS-interconnects. This article starts with a brief discussion of the oxidation behavior...
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Influence of plasmon resonance on the luminescence of titanium dioxide thin films doped with rare earth ions
PublicationIn this work the study of the optical properties of europium doped titanium dioxide thin films (TiO2:Eu) enhanced by gold plasmonic nanostructures are presented. Plasmonic platforms were manufactured by thermal annealing of thin film of Au, deposited on a Corning glass substrate. As a result of thermal treatment, gold spherical nanostructures with average dimensions of 50 nm were obtained. Luminescent TiO2:Eu film was deposited...
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Properties of Barium Cerate-Zirconate Thin Films
PublicationIn this work, we review several experimental results showing the electrical properties of barium cerate-zirconate thin films and discuss them in view of the possible influence of various factors on their properties. Most of the presented Ba(Ce, Zr, Y)O3 thin films were formed by the pulsed laser deposition (PLD) technique, however thin films prepared using other methods, like RF magnetron sputtering, electron-beam deposition, powder...
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Optical monitoring of electrochemical processes with ITO-based lossy-mode resonance optical fiber sensor applied as an electrode
PublicationIn this work we discuss the application of optical fiber sensors based on lossy-mode resonance (LMR) phenomenon for real-time optical monitoring of electrochemical processes. The sensors were obtained by a reactive high power impulse magnetron sputtering of indium tin oxide (ITO) on a 2.5 cm-long core of polymer-clad silica fibers. The LMR effect made monitoring of changes in optical properties of both ITO and its surrounding medium...
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Plasmon-enhanced photoluminescence from TiO2 and TeO2 thin films doped by Eu3+ for optoelectronic applications
PublicationIn this work we study the luminescence properties of europium-doped titanium dioxide and tellurium oxide thin films enhanced by gold plasmonic nanostructures. We propose a new type of plasmon structure with an ultrathin dielectric film between plasmonic platform and luminescent material. Plasmonic platforms were manufactured through thermal annealing of the gold thin film. Thermal dewetting of gold film results in spherical gold...
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Physicochemical and Mechanical Performance of Freestanding Boron-Doped Diamond Nanosheets Coated with C:H:N:O Plasma Polymer
PublicationThe physicochemical and mechanical properties of thin and freestanding heavy boron-doped diamond (BDD) nanosheets coated with a thin C:H:N:O plasma polymer were studied. First, diamond nanosheets were grown and doped with boron on a Ta substrate using the microwave plasma-enhanced chemical vapor deposition technique (MPECVD). Next, the BDD/Ta samples were covered with nylon 6.6 to improve their stability in harsh environments and...
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Photoinduced K+ Intercalation into MoO3/FTO Photoanode—the Impact on the Photoelectrochemical Performance
PublicationIn this work, thin layers of MoO3 were tested as potential photoanodes for water splitting. The influence of photointercalation of alkali metal cation (K+) into the MoO3 structure on the photoelectrochemical properties of the molybdenum trioxide films was investigated for the first time. MoO3 thin films were synthesized via thermal annealing of thin, metallic Mo films deposited onto the FTO substrate using a magnetron sputtering...
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Molybdenum sulfide modified with nickel or platinum nanoparticles as an effective catalyst for hydrogen evolution reaction
PublicationIn this study, we investigate the catalytic performance of molybdenum sulfide (MoS2) modified with either nickel (Ni) or platinum (Pt) nanoparticles as catalysts for the hydrogen evolution reaction (HER). The MoS2 was prepared on the TiO2 nanotube substrates via a facile hydrothermal method, followed by the deposition by magnetron sputtering of Ni or Pt nanoparticles on the MoS2 surface. Structural and morphological characterization...
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An NO2 sensor based on WO3 thin films for automotive applications in the microwave frequency range
PublicationA microwave system dedicated to the detection of nitrogen dioxide in the harsh environment of the Norway highways is proposed. An optimized transmission line type of sensor coated with a tungsten trioxide thin film that changes its electrical properties under NO2 gas exposure is developed. The sensors' response (S) is given in °/GHz and it is calculated based on wideband measurements. The advantage of wideband measurements in comparison...
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The Effect of Laser Re-Solidification on Microstructure and Photo-Electrochemical Properties of Fe-Decorated TiO2 Nanotubes
PublicationFossil fuels became increasingly unpleasant energy source due to their negative impact on the environment; thus, attractiveness of renewable, and especially solar energy, is growing worldwide. Among others, the research is focused on smart combination of simple compounds towards formation of the photoactive materials. Following that, our work concerns the optimized manipulation of laser light coupled with the iron sputtering to...
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Nucleation and growth of CVD diamond on fused silica optical fibres with titanium dioxide interlayer
PublicationNucleation and growth processes of thin diamond films on fused silica optical fibres have been investigated. Fibres were coated with diamond film using microwave plasma enhanced chemical vapour deposition (µPE CVD) system. Since the growth of diamond on the fused silica glass requires high seeding density, two types of glass pre-treatment were applied: titanium dioxide (TiO2) interlayer deposition and sonication in nanodiamond...
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Study on Combined Optical and Electrochemical Analysis Using Indium-tin-oxide-coated Optical Fiber Sensor
PublicationThe growing needs for fast and reliable sensing devices stimulate development of new technological solutions. In this work a new multi-domain sensing method is demonstrated where optical sensing device has been applied to enhance amount of data received during electrochemical analysis. Thin, optically transparent, high-refractive-index, and electrically conductive indium tin oxide (ITO) film was deposited using magnetron sputtering...
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Fabrication and Significant Photoelectrochemical Activity of Titania Nanotubes Modified with Thin Indium Tin Oxide Film
PublicationOrdered titanium dioxide nanotubes (TiO2NTs) modified with indium tin oxide (ITO) films were obtained via magnetron sputtering, in which ITO plate was used as a target, onto the as-anodized titania support followed by the calcination process. The morphology of fabricated material with deposited oxide was investigated using scanning electron microscopy. Raman and UV–Vis spectroscopies were utilized to characterize crystalline phase...
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Optical investigations of electrochemical processes using a long-period fiber grating functionalized by indium tin oxide
Publicationhe growing needs for fast and reliable sensing devices stimulate development of new technological solutions. In this work a new multi-domain sensing method is demonstrated where optical sensing device has been applied to enhance amount of data received during electrochemical analysis. Thin, optically transparent, high-refractive-index, and electrically conductive indium tin oxide (ITO) film was deposited using magnetron sputtering...
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Influence of Annealing Atmospheres on Photoelectrochemical Activity of TiO2 Nanotubes Modified with AuCu Nanoparticles
PublicationIn this article, we studied the annealing process of AuCu layers deposited on TiO2 nanotubes (NTs) conducted in various atmospheres such as air, vacuum, argon, and hydrogen in order to obtain materials active in both visible and UV–vis ranges. The material fabrication route covers the electrochemical anodization of a Ti plate, followed by thin AuCu film magnetron sputtering and further thermal treatment. Scanning electron microscopy...
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Anodic titania nanotubes decorated with gold nanoparticles produced by laser-induced dewetting of thin metallic films
PublicationHerein, we combine titania layers with gold species in a laser-supported process and report a substantial change of properties of the resulting heterostructures depending on the major processing parameters. Electrodes were fabricated via an anodisation process complemented with calcination to ensure a crystalline phase, and followed by magnetron sputtering of metallic films. The obtained TiO2 nanotubes with deposited thin (5, 10...
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Electrochemical performance of indium-tin-oxide-coated lossy-mode resonance optical fiber sensor
PublicationAnalysis of liquids performed in multiple domain, e.g., optical and electrochemical (EC), has recently focus significant attention. Our previous works have shown that a simple device based on indium-tin-oxide (ITO) coated optical fiber core may be used for optical monitoring of EC processes. At satisfying optical properties and thickness of ITO a lossy-mode resonance (LMR) effect can be obtained and used for monitoring of optical...
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Optical Detection of Ketoprofen by Its Electropolymerization on an Indium Tin Oxide-Coated Optical Fiber Probe
PublicationIn this work an application of optical fiber sensors for real-time optical monitoring of electrochemical deposition of ketoprofen during its anodic oxidation is discussed. The sensors were fabricated by reactive magnetron sputtering of indium tin oxide (ITO) on a 2.5 cm-long core of polymer-clad silica fibers. ITO tuned in optical properties and thickness allows for achieving a lossy-mode resonance (LMR) phenomenon and it can be...
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Insightful studies of AuCu nanostructures deposited on Ti platform: Effect of rapid thermal annealing on photoelectrochemical activity supported by synchrotron radiation studies
PublicationIn this work, we present the influence of annealing atmospheres during rapid thermal annealing (40◦C/s) on nanostructured Ti platforms modified by 10 nm layer of AuCu alloy obtained via magnetron sputtering. The AuCu/Ti platform annealed under hydrogen atmosphere exhibits the best photoelectrochemical activity under visible light, i.e. 27 times higher photocurrent than for pure Ti dimpled platform, and the lowest reflectance with minimum...
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Nanostructuring of thin Au films deposited on ordered Ti templates for applications in SERS
PublicationIn this work the results on thermal nanostructuring of the Au films on Ti templates as well as morphology and optical properties of the obtained structures are reported. The bimetal nanostructures are fabricated in a multi-step process. First, the titania nanotubes are produced on the surface of Ti foil by anodization in an ethylene glycol-water solution containing fluoride ions. This is followed by chemical etching in oxalic acid...
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Light-improved glucose sensing on ordered Au-Ti heterostructure
PublicationNon-enzymatic electrochemical platforms sensitive towards glucose presence have attracted a worldwide attention during last decades. We report on influence of solar light onto response of gold-titanium heterostructures prepared via controllable approach. The material based on Au nanoparticles orderly distributed over the structured titanium foil was obtained by electrochemical anodization followed by chemical etching, magnetron...
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A Flexible Nafion Coated Enzyme‐free Glucose Sensor Based on Au‐dimpled Ti Structures
PublicationThe detection of glucose at low concentrations using electrochemical sensors is of great importance due to the possibility of using different human body fluids than blood, such as e.g. urine, saliva, sweat or tears. The interest behind those biofluids is related to their utility in non-invasive sugar determination. In this work, we present flexible, fully biocompatible electrode material based on Au nanoparticles immobilized onto...
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Semi-transparent ordered TiO2 nanostructures prepared by anodization of titanium thin films deposited onto the FTO substrate
PublicationIn a significant amount of cases, the highly ordered TiO2nanotube arrays grow through anodic oxidationof a titanium metal plate immersed in electrolyte containing fluoride ions. However, for some practicalapplications, e.g. solar cells or electrochromic windows, the semi-transparent TiO2formed directly onthe transparent, conductive substrate is very much desired. This work shows that high-quality Ti coatingcould be formed at room...
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Non-enzymatic flexible glucose sensing platform based on nanostructured TiO2–Au composite
PublicationAll over the world the number of people suffering from diabetes and related complications is drastically growing. Therefore, the need for accurate, reliable and stable sensor for monitoring of glucose in human body fluids is becoming highly desirable. In this work we show that material composed of gold layers deposited onto TiO2 nanotubes (NTs) formed onto the flexible Ti foil exhibits great response toward glucose oxidation and...
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Enhanced photocatalytic activity of accordion-like layered Ti3C2 (MXene) coupled with Fe-modified decahedral anatase particles exposing {1 0 1} and {0 0 1} facets
PublicationNew composites consisting of decahedral anatase particles exposing {001} and {101} facets coupled with accordion-like layered Ti3C2 with boosted photocatalytic activity towards phenol and carbamazepine degradation were investigated. The photocatalysts were characterized with X-ray diffraction (XRD), diffuse reflectance spectroscopy (DR/UV–Vis), Brunauer-Emmett-Teller (BET) specific surface area, Raman spectroscopy, scanning electron...
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Tailoring properties of indium tin oxide thin films for their work in both electrochemical and optical label-free sensing systems
PublicationThis work is devoted to the identification properties of indium tin oxide (ITO) thin films responsible for their possible application in combined optical and electrochemical label-free sensing systems offering enhanced functionalities. Since any post-processing would make it difficult to identify direct relation between deposition parameters and properties of the ITO films, especially when deposition on temperature-sensitive substrates...